Fabrication of ceramic-based passive mixers for microfluidic application by thick film lithography

Jaekyung Choi; Young Joon Yoon; Jong Woo Lim; Hyo Tae Kim; Eun Hae Koo; Youn Suk Choi; Jong Heun Lee; Jong Hee Kim

doi:10.4191/KCERS.2008.45.1.739

Fabrication of ceramic-based passive mixers for microfluidic application by thick film lithography

Jaekyung Choi, Young Joon Yoon, Jong Woo Lim, Hyo Tae Kim, Eun Hae Koo, Youn Suk Choi, Jong Heun Lee, Jong Hee Kim

Research output: Contribution to journal › Article › peer-review

Abstract

Microfluidic device can be applied in a wide range of chemical and biological technology. In this paper, ceramic-based T-type passive mixers for microfluidic applications were fabricated by LTCC process combined with thick film photolithography. The base ceramic material in thick film was amorphous cordierite ((Mg,Ca)₂Al₄Si₅O₁₈) and photoimageable polymers were added to give a photosensitivity. Two types of passive mixer, which showed the channel width of 1.0 mm and 200 um, respectively, were designed considering mixing efficiency in the channel and their microfluidic properties were discussed in detail.

Original language	English
Pages (from-to)	739-743
Number of pages	5
Journal	Journal of the Korean Ceramic Society
Volume	45
Issue number	11
DOIs	https://doi.org/10.4191/KCERS.2008.45.1.739
Publication status	Published - 2008 Nov

Keywords

Ceramic passive mixer
Cordierite
Microfluidics
Photoimageable paste
Photolithography

ASJC Scopus subject areas

Ceramics and Composites

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10.4191/KCERS.2008.45.1.739

Cite this

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title = "Fabrication of ceramic-based passive mixers for microfluidic application by thick film lithography",

abstract = "Microfluidic device can be applied in a wide range of chemical and biological technology. In this paper, ceramic-based T-type passive mixers for microfluidic applications were fabricated by LTCC process combined with thick film photolithography. The base ceramic material in thick film was amorphous cordierite ((Mg,Ca)2Al4Si5O18) and photoimageable polymers were added to give a photosensitivity. Two types of passive mixer, which showed the channel width of 1.0 mm and 200 um, respectively, were designed considering mixing efficiency in the channel and their microfluidic properties were discussed in detail.",

keywords = "Ceramic passive mixer, Cordierite, Microfluidics, Photoimageable paste, Photolithography",

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AU - Choi, Jaekyung

AU - Yoon, Young Joon

AU - Lim, Jong Woo

AU - Kim, Hyo Tae

AU - Koo, Eun Hae

AU - Choi, Youn Suk

AU - Lee, Jong Heun

AU - Kim, Jong Hee

PY - 2008/11

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N2 - Microfluidic device can be applied in a wide range of chemical and biological technology. In this paper, ceramic-based T-type passive mixers for microfluidic applications were fabricated by LTCC process combined with thick film photolithography. The base ceramic material in thick film was amorphous cordierite ((Mg,Ca)2Al4Si5O18) and photoimageable polymers were added to give a photosensitivity. Two types of passive mixer, which showed the channel width of 1.0 mm and 200 um, respectively, were designed considering mixing efficiency in the channel and their microfluidic properties were discussed in detail.

AB - Microfluidic device can be applied in a wide range of chemical and biological technology. In this paper, ceramic-based T-type passive mixers for microfluidic applications were fabricated by LTCC process combined with thick film photolithography. The base ceramic material in thick film was amorphous cordierite ((Mg,Ca)2Al4Si5O18) and photoimageable polymers were added to give a photosensitivity. Two types of passive mixer, which showed the channel width of 1.0 mm and 200 um, respectively, were designed considering mixing efficiency in the channel and their microfluidic properties were discussed in detail.

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KW - Cordierite

KW - Microfluidics

KW - Photoimageable paste

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Fabrication of ceramic-based passive mixers for microfluidic application by thick film lithography

Abstract

Keywords

ASJC Scopus subject areas

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