Fabrication of CNT/metal torsional resonator structures on GaAs

Seung Sae Hong; Jung Hoon Bak; Byung Yang Lee; Sung Woon Cho; Young Duck Kim; Seunghun Hong; Yun Daniel Park

doi:10.1557/proc-1018-ee08-12

Fabrication of CNT/metal torsional resonator structures on GaAs

Seung Sae Hong, Jung Hoon Bak, Byung Yang Lee, Sung Woon Cho, Young Duck Kim, Seunghun Hong, Yun Daniel Park

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

Original language	English
Title of host publication	Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires
Publisher	Materials Research Society
Pages	105-110
Number of pages	6
ISBN (Print)	9781605604251
DOIs	https://doi.org/10.1557/proc-1018-ee08-12
Publication status	Published - 2007
Event	Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting - San Francisco, CA, United States Duration: 2007 Apr 9 → 2007 Apr 13

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	1018
ISSN (Print)	0272-9172

Other

Other	Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting
Country	United States
City	San Francisco, CA
Period	07/4/9 → 07/4/13

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Cite this

Hong, S. S., Bak, J. H., Lee, B. Y., Cho, S. W., Kim, Y. D., Hong, S., & Park, Y. D. (2007). Fabrication of CNT/metal torsional resonator structures on GaAs. In Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires (pp. 105-110). (Materials Research Society Symposium Proceedings; Vol. 1018). Materials Research Society. https://doi.org/10.1557/proc-1018-ee08-12

Fabrication of CNT/metal torsional resonator structures on GaAs. / Hong, Seung Sae; Bak, Jung Hoon; Lee, Byung Yang; Cho, Sung Woon; Kim, Young Duck; Hong, Seunghun; Park, Yun Daniel.

Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires. Materials Research Society, 2007. p. 105-110 (Materials Research Society Symposium Proceedings; Vol. 1018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hong, SS, Bak, JH, Lee, BY, Cho, SW, Kim, YD, Hong, S & Park, YD 2007, Fabrication of CNT/metal torsional resonator structures on GaAs. in Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires. Materials Research Society Symposium Proceedings, vol. 1018, Materials Research Society, pp. 105-110, Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting, San Francisco, CA, United States, 07/4/9. https://doi.org/10.1557/proc-1018-ee08-12

Hong, Seung Sae ; Bak, Jung Hoon ; Lee, Byung Yang ; Cho, Sung Woon ; Kim, Young Duck ; Hong, Seunghun ; Park, Yun Daniel. / Fabrication of CNT/metal torsional resonator structures on GaAs. Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires. Materials Research Society, 2007. pp. 105-110 (Materials Research Society Symposium Proceedings).

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abstract = "We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.",

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