Fabrication of CNT/metal torsional resonator structures on GaAs

Seung Sae Hong; Jung Hoon Bak; Byung Yang Lee; Sung Woon Cho; Young Duck Kim; Seunghun Hong; Yun Daniel Park

doi:10.1557/proc-1018-ee08-12

Fabrication of CNT/metal torsional resonator structures on GaAs

Seung Sae Hong, Jung Hoon Bak, Byung Yang Lee, Sung Woon Cho, Young Duck Kim, Seunghun Hong, Yun Daniel Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

Original language	English
Title of host publication	Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires
Publisher	Materials Research Society
Pages	105-110
Number of pages	6
ISBN (Print)	9781605604251
DOIs	https://doi.org/10.1557/proc-1018-ee08-12
Publication status	Published - 2007
Externally published	Yes
Event	Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting - San Francisco, CA, United States Duration: 2007 Apr 9 → 2007 Apr 13

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	1018
ISSN (Print)	0272-9172

Other

Other	Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting
Country	United States
City	San Francisco, CA
Period	07/4/9 → 07/4/13

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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Cite this

Hong, S. S., Bak, J. H., Lee, B. Y., Cho, S. W., Kim, Y. D., Hong, S., & Park, Y. D. (2007). Fabrication of CNT/metal torsional resonator structures on GaAs. In Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires (pp. 105-110). (Materials Research Society Symposium Proceedings; Vol. 1018). Materials Research Society. https://doi.org/10.1557/proc-1018-ee08-12

Fabrication of CNT/metal torsional resonator structures on GaAs. / Hong, Seung Sae; Bak, Jung Hoon; Lee, Byung Yang; Cho, Sung Woon; Kim, Young Duck; Hong, Seunghun; Park, Yun Daniel.

Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires. Materials Research Society, 2007. p. 105-110 (Materials Research Society Symposium Proceedings; Vol. 1018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hong, SS, Bak, JH, Lee, BY, Cho, SW, Kim, YD, Hong, S & Park, YD 2007, Fabrication of CNT/metal torsional resonator structures on GaAs. in Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires. Materials Research Society Symposium Proceedings, vol. 1018, Materials Research Society, pp. 105-110, Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting, San Francisco, CA, United States, 07/4/9. https://doi.org/10.1557/proc-1018-ee08-12

Hong, Seung Sae ; Bak, Jung Hoon ; Lee, Byung Yang ; Cho, Sung Woon ; Kim, Young Duck ; Hong, Seunghun ; Park, Yun Daniel. / Fabrication of CNT/metal torsional resonator structures on GaAs. Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires. Materials Research Society, 2007. pp. 105-110 (Materials Research Society Symposium Proceedings).

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abstract = "We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.",

author = "Hong, {Seung Sae} and Bak, {Jung Hoon} and Lee, {Byung Yang} and Cho, {Sung Woon} and Kim, {Young Duck} and Seunghun Hong and Park, {Yun Daniel}",

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AB - We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

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