Fabrication of CNT/metal torsional resonator structures on GaAs

Seung Sae Hong, Jung Hoon Bak, Byung Yang Lee, Sung Woon Cho, Young Duck Kim, Seunghun Hong, Yun Daniel Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires
PublisherMaterials Research Society
Pages105-110
Number of pages6
ISBN (Print)9781605604251
DOIs
Publication statusPublished - 2007
Externally publishedYes
EventApplications of Nanotubes and Nanowires - 2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: 2007 Apr 92007 Apr 13

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1018
ISSN (Print)0272-9172

Other

OtherApplications of Nanotubes and Nanowires - 2007 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period07/4/907/4/13

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Hong, S. S., Bak, J. H., Lee, B. Y., Cho, S. W., Kim, Y. D., Hong, S., & Park, Y. D. (2007). Fabrication of CNT/metal torsional resonator structures on GaAs. In Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires (pp. 105-110). (Materials Research Society Symposium Proceedings; Vol. 1018). Materials Research Society. https://doi.org/10.1557/proc-1018-ee08-12