TY - GEN
T1 - Fabrication of CNT/metal torsional resonator structures on GaAs
AU - Hong, Seung Sae
AU - Bak, Jung Hoon
AU - Lee, Byung Yang
AU - Cho, Sung Woon
AU - Kim, Young Duck
AU - Hong, Seunghun
AU - Park, Yun Daniel
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2007
Y1 - 2007
N2 - We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.
AB - We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.
UR - http://www.scopus.com/inward/record.url?scp=70349944340&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70349944340&partnerID=8YFLogxK
U2 - 10.1557/proc-1018-ee08-12
DO - 10.1557/proc-1018-ee08-12
M3 - Conference contribution
AN - SCOPUS:70349944340
SN - 9781605604251
T3 - Materials Research Society Symposium Proceedings
SP - 105
EP - 110
BT - Materials Research Society Symposium Proceedings - Applications of Nanotubes and Nanowires
PB - Materials Research Society
T2 - Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting
Y2 - 9 April 2007 through 13 April 2007
ER -