Abstract
We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium Proceedings |
| Pages | 105-110 |
| Number of pages | 6 |
| Volume | 1018 |
| Publication status | Published - 2007 Dec 1 |
| Externally published | Yes |
| Event | Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting - San Francisco, CA, United States Duration: 2007 Apr 9 → 2007 Apr 13 |
Other
| Other | Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting |
|---|---|
| Country | United States |
| City | San Francisco, CA |
| Period | 07/4/9 → 07/4/13 |
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ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanical Engineering
- Mechanics of Materials
Cite this
Hong, S. S., Bak, J. H., Lee, B. Y., Cho, S. W., Kim, Y. D., Hong, S., & Park, Y. D. (2007). Fabrication of CNT/metal torsional resonator structures on GaAs. In Materials Research Society Symposium Proceedings (Vol. 1018, pp. 105-110)