Abstract
We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium Proceedings |
| Pages | 105-110 |
| Number of pages | 6 |
| Volume | 1018 |
| Publication status | Published - 2007 Dec 1 |
| Externally published | Yes |
| Event | Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting - San Francisco, CA, United States Duration: 2007 Apr 9 → 2007 Apr 13 |
Other
| Other | Applications of Nanotubes and Nanowires - 2007 MRS Spring Meeting |
|---|---|
| Country | United States |
| City | San Francisco, CA |
| Period | 07/4/9 → 07/4/13 |
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ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanical Engineering
- Mechanics of Materials
Cite this
Fabrication of CNT/metal torsional resonator structures on GaAs. / Hong, Seung Sae; Bak, Jung Hoon; Lee, Byung Yang; Cho, Sung Woon; Kim, Young Duck; Hong, Seunghun; Park, Yun Daniel.
Materials Research Society Symposium Proceedings. Vol. 1018 2007. p. 105-110.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Fabrication of CNT/metal torsional resonator structures on GaAs
AU - Hong, Seung Sae
AU - Bak, Jung Hoon
AU - Lee, Byung Yang
AU - Cho, Sung Woon
AU - Kim, Young Duck
AU - Hong, Seunghun
AU - Park, Yun Daniel
PY - 2007/12/1
Y1 - 2007/12/1
N2 - We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.
AB - We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.
UR - http://www.scopus.com/inward/record.url?scp=70349944340&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70349944340&partnerID=8YFLogxK
M3 - Conference contribution
SN - 9781605604251
VL - 1018
SP - 105
EP - 110
BT - Materials Research Society Symposium Proceedings
ER -