Fabrication of CNT/metal torsional resonator structures on GaAs

Seung Sae Hong, Jung Hoon Bak, Byung Yang Lee, Sung Woon Cho, Young Duck Kim, Seunghun Hong, Yun Daniel Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Number of pages6
Publication statusPublished - 2007 Dec 1
Externally publishedYes
EventApplications of Nanotubes and Nanowires - 2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: 2007 Apr 92007 Apr 13


OtherApplications of Nanotubes and Nanowires - 2007 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA


ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Hong, S. S., Bak, J. H., Lee, B. Y., Cho, S. W., Kim, Y. D., Hong, S., & Park, Y. D. (2007). Fabrication of CNT/metal torsional resonator structures on GaAs. In Materials Research Society Symposium Proceedings (Vol. 1018, pp. 105-110)