Fabrication of electro-active polymer actuator composed of polypyrrole and solid-polymer electrolyte and its application to micropump

Seung Ki Lee, Young Choi, Woo Young Sim, Sang Sik Yang, Ho Jung An, James Jungho Pak

Research output: Contribution to journalConference article

9 Citations (Scopus)

Abstract

Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed varying polymerization conditions and operating conditions. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm2 for 120 minutes. For the application of conductive polymer actuator to micropump, silicon bulk micromachining process has been combined with polymer processes. By use of parylene diaphragm and anisotropic etching of silicon, the micropump structure composed of polypyrrole and solid polymer electrolyte has been fabricated successfully.

Original languageEnglish
Pages (from-to)291-299
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3987
DOIs
Publication statusPublished - 2000
Externally publishedYes
EventSmart Structures and Materials 2000 - Electroactive Polymer Actuators and Devices (EAPAD) - Newport Beach, CA, USA
Duration: 2000 Mar 62000 Mar 8

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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