Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

Chang Seung Woo; Chae Hyun Lim; Chi Won Cho; Bonghyun Park; Heongkyu Ju; Dong Hun Min; Cheol Jin Lee; Seung Beck Lee

doi:10.1016/j.mee.2007.01.162

Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

Chang Seung Woo, Chae Hyun Lim, Chi Won Cho, Bonghyun Park, Heongkyu Ju, Dong Hun Min, Cheol Jin Lee, Seung Beck Lee

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

56 Citations (Scopus)

Abstract

We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH₃ gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.

Original language	English
Pages (from-to)	1610-1613
Number of pages	4
Journal	Microelectronic Engineering
Volume	84
Issue number	5-8
DOIs	https://doi.org/10.1016/j.mee.2007.01.162
Publication status	Published - 2007 May

Keywords

Carbon nanotubes
Flexible thin-film
Gas sensor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.mee.2007.01.162

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title = "Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer",

abstract = "We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.",

keywords = "Carbon nanotubes, Flexible thin-film, Gas sensor",

author = "Woo, {Chang Seung} and Lim, {Chae Hyun} and Cho, {Chi Won} and Bonghyun Park and Heongkyu Ju and Min, {Dong Hun} and Lee, {Cheol Jin} and Lee, {Seung Beck}",

note = "Funding Information: This work was supported by the National R&D Project for Nano Science and Technology sponsored by the Ministry of Commerce, Industry and Energy, and partly by the BK21 program and the Cavendish-KAIST Joint Research Program sponsored by the Ministry of Science and Technology.",

year = "2007",

month = may,

doi = "10.1016/j.mee.2007.01.162",

language = "English",

volume = "84",

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journal = "Microelectronic Engineering",

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T1 - Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

AU - Woo, Chang Seung

AU - Lim, Chae Hyun

AU - Cho, Chi Won

AU - Park, Bonghyun

AU - Ju, Heongkyu

AU - Min, Dong Hun

AU - Lee, Cheol Jin

AU - Lee, Seung Beck

N1 - Funding Information: This work was supported by the National R&D Project for Nano Science and Technology sponsored by the Ministry of Commerce, Industry and Energy, and partly by the BK21 program and the Cavendish-KAIST Joint Research Program sponsored by the Ministry of Science and Technology.

PY - 2007/5

Y1 - 2007/5

N2 - We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.

AB - We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.

KW - Carbon nanotubes

KW - Flexible thin-film

KW - Gas sensor

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SN - 0167-9317

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ER -

Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

Abstract

Keywords

ASJC Scopus subject areas

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