Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

Chang Seung Woo, Chae Hyun Lim, Chi Won Cho, Bonghyun Park, Heongkyu Ju, Dong Hun Min, Cheol Jin Lee, Seung Beck Lee

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT's PDMS surface coverage was directly related to the thin-film's optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.

Original languageEnglish
Pages (from-to)1610-1613
Number of pages4
JournalMicroelectronic Engineering
Volume84
Issue number5-8
DOIs
Publication statusPublished - 2007 May

Keywords

  • Carbon nanotubes
  • Flexible thin-film
  • Gas sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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