Fabrication of flexible device based on PAN-PZT thin films by laser lift-off process

Young Ho Do, Min Gyu Kang, Jin Sang Kim, Chong Yun Kang, Seok Jin Yoon

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

The ferroelectric properties of flexible devices based on 0.05Pb(Al 0.5Nb 0.5)O 3-0.95Pb(Zr 0.52Ti 0.48)O 3 + 0.7 wt.%Nb 2O 5 + 0.5 wt.%MnO 2 (PAN-PZT) thin films, which were fabricated using a laser lift-off (LLO) process, were investigated. The flexible devices based on PAN-PZT thin films were coated with a sacrificial layer, which prevented or minimized damage during LLO process. The structural and electrical properties of the PAN-PZT thin films before and after LLO process demonstrated that the crystallographic and ferroelectric properties of the device were retained after LLO process. Flexible devices based on PAN-PZT thin films coated with a sacrificial layer may be fabricated using the LLO process for the production of flexible electronic devices.

Original languageEnglish
Pages (from-to)124-127
Number of pages4
JournalSensors and Actuators, A: Physical
Volume184
DOIs
Publication statusPublished - 2012 Sep 1

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Keywords

  • Ferroelectric properties
  • Films process
  • Functional applications
  • Laser lift-off
  • PZT

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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