Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film

Ju Hyeon Shin, Seong Hwan Lee, Kyeong Jae Byeon, Kang Soo Han, Heon Lee, Kentaro Tsunozaki

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nanosized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusions, having a low surface energy and good flexibility. Therefore, the development of low-cost, transparent, and flexible templates is essential. In this study, a flexible polyethylene terephthalate (PET) film coated with a fluorinated polymer material was used as an imprinting mold. Micro- and nano-sized surface protrusion patterns were formed on the fluorinated polymer layer by the hot embossing process from a Si master template. Then, the replicated pattern of the fluorinated polymer, coated on the flexible PET film, was used as a template for the UV nanoimprint process without any anti-stiction coating process. In this way, the micro- to nano-sized patterns of the original master Si template were replicated on various substrates, including a flat Si substrate and curved acryl substrate, with high fidelity using UV nanoimprint lithography.

Original languageEnglish
Article number458
Pages (from-to)1-5
Number of pages5
JournalNanoscale Research Letters
Volume6
DOIs
Publication statusPublished - 2011 Dec 1

Fingerprint

Fluorocarbon Polymers
Polyethylene Terephthalates
polyethylene terephthalate
Polyethylene terephthalates
templates
Nanoimprint lithography
Fabrication
fabrication
polymers
Polymers
Substrates
Stiction
lithography
stiction
embossing
Interfacial energy
production costs
Curing
Costs
curing

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film. / Shin, Ju Hyeon; Lee, Seong Hwan; Byeon, Kyeong Jae; Han, Kang Soo; Lee, Heon; Tsunozaki, Kentaro.

In: Nanoscale Research Letters, Vol. 6, 458, 01.12.2011, p. 1-5.

Research output: Contribution to journalArticle

Shin, Ju Hyeon ; Lee, Seong Hwan ; Byeon, Kyeong Jae ; Han, Kang Soo ; Lee, Heon ; Tsunozaki, Kentaro. / Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film. In: Nanoscale Research Letters. 2011 ; Vol. 6. pp. 1-5.
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