Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

Yinlan Ruan, Myung-Ki Kim, Yong He Lee, Barry Luther-Davies, Andrei Rode

Research output: Contribution to journalArticle

36 Citations (Scopus)

Abstract

The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

Original languageEnglish
Article number071102
JournalApplied Physics Letters
Volume90
Issue number7
DOIs
Publication statusPublished - 2007 Feb 26
Externally publishedYes

Fingerprint

Q factors
lithography
resonators
photonics
fabrication
crystals
cavities
optical fibers
ion beams
etching
radii
glass
wavelengths

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography. / Ruan, Yinlan; Kim, Myung-Ki; Lee, Yong He; Luther-Davies, Barry; Rode, Andrei.

In: Applied Physics Letters, Vol. 90, No. 7, 071102, 26.02.2007.

Research output: Contribution to journalArticle

Ruan, Yinlan ; Kim, Myung-Ki ; Lee, Yong He ; Luther-Davies, Barry ; Rode, Andrei. / Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography. In: Applied Physics Letters. 2007 ; Vol. 90, No. 7.
@article{fe5f033de09543208bfcf82cfe2eedb2,
title = "Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography",
abstract = "The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.",
author = "Yinlan Ruan and Myung-Ki Kim and Lee, {Yong He} and Barry Luther-Davies and Andrei Rode",
year = "2007",
month = "2",
day = "26",
doi = "10.1063/1.2476416",
language = "English",
volume = "90",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "7",

}

TY - JOUR

T1 - Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

AU - Ruan, Yinlan

AU - Kim, Myung-Ki

AU - Lee, Yong He

AU - Luther-Davies, Barry

AU - Rode, Andrei

PY - 2007/2/26

Y1 - 2007/2/26

N2 - The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

AB - The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

UR - http://www.scopus.com/inward/record.url?scp=33847173764&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847173764&partnerID=8YFLogxK

U2 - 10.1063/1.2476416

DO - 10.1063/1.2476416

M3 - Article

AN - SCOPUS:33847173764

VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 7

M1 - 071102

ER -