Fabrication of high- Q chalcogenide photonic crystal resonators by e-beam lithography

Yinlan Ruan, Myung Ki Kim, Yong He Lee, Barry Luther-Davies, Andrei Rode

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37 Citations (Scopus)

Abstract

The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber.

Original languageEnglish
Article number071102
JournalApplied Physics Letters
Volume90
Issue number7
DOIs
Publication statusPublished - 2007

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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