Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion

James Jungho Pak, Jihong Kim, Sang Woo Oh, Jee Hee Son, Sung Hwan Cho, Seung Ki Lee, Jong Yeon Park, Byungkyu Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Citations (Scopus)

Abstract

This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14-̃27 μm at the applied voltage ranging from 4V P-P to 10V P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm 2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsY. Bar-Cohen
Pages272-280
Number of pages9
Volume5385
DOIs
Publication statusPublished - 2004
EventSmart Structures and Materials 2004 - Electroactive Polymer Actuators and Devices (EAPAD) - San Diego, CA, United Kingdom
Duration: 2004 Mar 152004 Mar 18

Other

OtherSmart Structures and Materials 2004 - Electroactive Polymer Actuators and Devices (EAPAD)
CountryUnited Kingdom
CitySan Diego, CA
Period04/3/1504/3/18

Fingerprint

Fabrication
fabrication
Actuators
composite materials
actuators
Composite materials
polymers
Polymers
Metals
metals
Composite membranes
membranes
Pumps
pumps
Polydimethylsiloxane
Electric potential
electric potential
Diffusers (fluid)
diffusers
Solid electrolytes

Keywords

  • Actuator
  • Micropump
  • Parylene
  • Polypyrrole
  • Solid polymer electrolyte

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Pak, J. J., Kim, J., Oh, S. W., Son, J. H., Cho, S. H., Lee, S. K., ... Kim, B. (2004). Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion. In Y. Bar-Cohen (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5385, pp. 272-280) https://doi.org/10.1117/12.539671

Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion. / Pak, James Jungho; Kim, Jihong; Oh, Sang Woo; Son, Jee Hee; Cho, Sung Hwan; Lee, Seung Ki; Park, Jong Yeon; Kim, Byungkyu.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Y. Bar-Cohen. Vol. 5385 2004. p. 272-280.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pak, JJ, Kim, J, Oh, SW, Son, JH, Cho, SH, Lee, SK, Park, JY & Kim, B 2004, Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion. in Y Bar-Cohen (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5385, pp. 272-280, Smart Structures and Materials 2004 - Electroactive Polymer Actuators and Devices (EAPAD), San Diego, CA, United Kingdom, 04/3/15. https://doi.org/10.1117/12.539671
Pak JJ, Kim J, Oh SW, Son JH, Cho SH, Lee SK et al. Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion. In Bar-Cohen Y, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5385. 2004. p. 272-280 https://doi.org/10.1117/12.539671
Pak, James Jungho ; Kim, Jihong ; Oh, Sang Woo ; Son, Jee Hee ; Cho, Sung Hwan ; Lee, Seung Ki ; Park, Jong Yeon ; Kim, Byungkyu. / Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion. Proceedings of SPIE - The International Society for Optical Engineering. editor / Y. Bar-Cohen. Vol. 5385 2004. pp. 272-280
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abstract = "This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14-̃27 μm at the applied voltage ranging from 4V P-P to 10V P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50{\%}, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm 2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.",
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