Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion

James Jungho Pak; Jihong Kim; Sang Woo Oh; Jee Hee Son; Sung Hwan Cho; Seung Ki Lee; Jong Yeon Park; Byungkyu Kim

doi:10.1117/12.539671

Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion

James Jungho Pak, Jihong Kim, Sang Woo Oh, Jee Hee Son, Sung Hwan Cho, Seung Ki Lee, Jong Yeon Park, Byungkyu Kim

School of Electrical Engineering

Research output: Contribution to journal › Conference article

35 Citations (Scopus)

Abstract

This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14-̃27 μm at the applied voltage ranging from 4V _P-P to 10V _P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V _P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm ² for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.

Original language	English
Pages (from-to)	272-280
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5385
DOIs	https://doi.org/10.1117/12.539671
Publication status	Published - 2004
Event	Smart Structures and Materials 2004 - Electroactive Polymer Actuators and Devices (EAPAD) - San Diego, CA, United Kingdom Duration: 2004 Mar 15 → 2004 Mar 18

Keywords

Actuator
Micropump
Parylene
Polypyrrole
Solid polymer electrolyte

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.539671

Fingerprint Dive into the research topics of 'Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion'. Together they form a unique fingerprint.

Cite this

Pak, J. J., Kim, J., Oh, S. W., Son, J. H., Cho, S. H., Lee, S. K., Park, J. Y., & Kim, B. (2004). Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion. Proceedings of SPIE - The International Society for Optical Engineering, 5385, 272-280. https://doi.org/10.1117/12.539671

Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion. / Pak, James Jungho; Kim, Jihong; Oh, Sang Woo; Son, Jee Hee; Cho, Sung Hwan; Lee, Seung Ki; Park, Jong Yeon; Kim, Byungkyu.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5385, 2004, p. 272-280.

Research output: Contribution to journal › Conference article

@article{e2f6479e6b1b4c508a8f87ec08012d75,

title = "Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion",

abstract = "This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14{\~-}27 μm at the applied voltage ranging from 4V P-P to 10V P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm 2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.",

keywords = "Actuator, Micropump, Parylene, Polypyrrole, Solid polymer electrolyte",

author = "Pak, {James Jungho} and Jihong Kim and Oh, {Sang Woo} and Son, {Jee Hee} and Cho, {Sung Hwan} and Lee, {Seung Ki} and Park, {Jong Yeon} and Byungkyu Kim",

year = "2004",

doi = "10.1117/12.539671",

language = "English",

volume = "5385",

pages = "272--280",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Smart Structures and Materials 2004 - Electroactive Polymer Actuators and Devices (EAPAD) ; Conference date: 15-03-2004 Through 18-03-2004",

}

TY - JOUR

T1 - Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion

AU - Pak, James Jungho

AU - Kim, Jihong

AU - Oh, Sang Woo

AU - Son, Jee Hee

AU - Cho, Sung Hwan

AU - Lee, Seung Ki

AU - Park, Jong Yeon

AU - Kim, Byungkyu

PY - 2004

Y1 - 2004

N2 - This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14-̃27 μm at the applied voltage ranging from 4V P-P to 10V P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm 2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.

AB - This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14-̃27 μm at the applied voltage ranging from 4V P-P to 10V P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm 2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.

KW - Actuator

KW - Micropump

KW - Parylene

KW - Polypyrrole

KW - Solid polymer electrolyte

UR - http://www.scopus.com/inward/record.url?scp=8844262668&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=8844262668&partnerID=8YFLogxK

U2 - 10.1117/12.539671

DO - 10.1117/12.539671

M3 - Conference article

AN - SCOPUS:8844262668

VL - 5385

SP - 272

EP - 280

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - Smart Structures and Materials 2004 - Electroactive Polymer Actuators and Devices (EAPAD)

Y2 - 15 March 2004 through 18 March 2004

ER -