Abstract
This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14-̃27 μm at the applied voltage ranging from 4V P-P to 10V P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm 2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Editors | Y. Bar-Cohen |
| Pages | 272-280 |
| Number of pages | 9 |
| Volume | 5385 |
| DOIs | |
| Publication status | Published - 2004 |
| Event | Smart Structures and Materials 2004 - Electroactive Polymer Actuators and Devices (EAPAD) - San Diego, CA, United Kingdom Duration: 2004 Mar 15 → 2004 Mar 18 |
Other
| Other | Smart Structures and Materials 2004 - Electroactive Polymer Actuators and Devices (EAPAD) |
|---|---|
| Country | United Kingdom |
| City | San Diego, CA |
| Period | 04/3/15 → 04/3/18 |
Fingerprint
Keywords
- Actuator
- Micropump
- Parylene
- Polypyrrole
- Solid polymer electrolyte
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion. / Pak, James Jungho; Kim, Jihong; Oh, Sang Woo; Son, Jee Hee; Cho, Sung Hwan; Lee, Seung Ki; Park, Jong Yeon; Kim, Byungkyu.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / Y. Bar-Cohen. Vol. 5385 2004. p. 272-280.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Fabrication of ionic-polymer-metal-composite (IPMC) micropump using a commercial Nafion
AU - Pak, James Jungho
AU - Kim, Jihong
AU - Oh, Sang Woo
AU - Son, Jee Hee
AU - Cho, Sung Hwan
AU - Lee, Seung Ki
AU - Park, Jong Yeon
AU - Kim, Byungkyu
PY - 2004
Y1 - 2004
N2 - This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14-̃27 μm at the applied voltage ranging from 4V P-P to 10V P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm 2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.
AB - This paper describes the fabrication and characteristics of an ionic polymer-metal composite (IPMC) membrane-shaped micro-actuator and its application to the fabrication of a micro-pump. After fabricating two 8mm×8mm IPMC membrane-shaped actuators using a Nafion film, their displacements were measured. The fabricated IPMC membrane-shaped micro-actuators showed displacement of 14-̃27 μm at the applied voltage ranging from 4V P-P to 10V P-P at 0.5Hz. Displacement of the IPMC actuator fabricated with a commercially available Nafion is large enough to make the IPMC actuator a membrane-shaped micro-actuator for fabricating an IPMC micro-pump. IPMC micro-pump was fabricated by assembling IPMC membrane-shaped micro-actuator and PDMS(polydimethylsiloxane) micro-channel together. PDMS micro-channel was designed to have nozzle/diffuser structures which make the fluids flow from inlet to outlet when the IPMC membrane-shaped micro-actuator is deflected up and down by the applied voltages. The measured flow rate of the fabricated IPMC micro-pump was about 9.97 μl/min at 0.5Hz when the input voltage and duty ratio were 8V P-P and 50%, respectively. The test results illustrate that the fabricated IPMC micro-pump is suitable for pumping fluid through micro-channel on a PDMS substrate. Mechanical performances of beam-shaped and bridge-shaped conductive polymer actuator in aqueous solution and in solid electrolyte have been measured and analyzed. The optimum thickness of polypyrrole for the best bending performance is about 17-19 μm which has been polymerized at the current density of 5.4 μA/mm 2 for 120 minutes. For the application of conductive polymer actuator to a micropump, silicon bulk micromachining process has been combined.
KW - Actuator
KW - Micropump
KW - Parylene
KW - Polypyrrole
KW - Solid polymer electrolyte
UR - http://www.scopus.com/inward/record.url?scp=8844262668&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=8844262668&partnerID=8YFLogxK
U2 - 10.1117/12.539671
DO - 10.1117/12.539671
M3 - Conference contribution
AN - SCOPUS:8844262668
VL - 5385
SP - 272
EP - 280
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Bar-Cohen, Y.
ER -