Fabrication of metal nanowire using carbon nanotube as a mask

Wan Soo Yun, Jinhee Kim, Kang Ho Park, Jeong Sook Ha, Young Jo Ko, Kyoungwan Park, Seong Keun Kim, Yong Joo Doh, Hu Jong Lee, Jean Paul Salvetat, László Forró

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69 Citations (Scopus)

Abstract

Carbon nanotubes (CNTs), which are used as a mask for the Ar + ion etching in the fabrication of metal nanowires, is demonstrated. Au/Ti nanowires of a few nanometers in width are obtained by a simple procedure of CNT deposition on a metal layer followed by Ar + ion milling. The CNTs acted as a good mask against Ar + ion bombardment, and the Au/Ti nanowires duplicated the lateral shape of the CNTs. The remaining CNTs after the ion milling are removed from the resulting nanowires by atomic force microscopy (AFM) manipulation.

Original languageEnglish
Pages (from-to)1329-1332
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume18
Issue number4 I
DOIs
Publication statusPublished - 2000 Jul 1
Externally publishedYes

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ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Yun, W. S., Kim, J., Park, K. H., Ha, J. S., Ko, Y. J., Park, K., Kim, S. K., Doh, Y. J., Lee, H. J., Salvetat, J. P., & Forró, L. (2000). Fabrication of metal nanowire using carbon nanotube as a mask. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 18(4 I), 1329-1332. https://doi.org/10.1116/1.582349