Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr 0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics

Jae Hong Park, Tae Yun Kwon, Dae Sung Yoon, Hwan Kim, Tae Song Kim

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

The integration and the device realization of Pb(Zr, Ti)O3 (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thick-film devices on Si warrant attention as they are appropriate for biological transducers; they generate large actuating forces and have a relatively high sensitivity for mass detection, especially in liquids. In this study, Pb(Zr0.52Ti0.48)O3 thick-film cantilever devices are successfully fabricated on a Pt/TiO2/SiN x/Si substrate using a screen-printing method and microelectromechanical systems (MEMS) process. Elastic and electromechanical properties such as the Young's modulus and transverse piezoelectric coefficient are determined from microstructural and electrical analyses for further mechanical study. The calculated Young's modulus of the thick film, 53.9 ± 3.85 GPa, corresponds to the resonant frequency obtained from the measured harmonic oscillation response. The transverse piezoelectric constant, d31, of -20.7 to -18.8 pCN-1 is comparable to that of a dense thin film. These values promise the possibility of determining the resonance properties of a thick-film cantilever by designing its structure and then simulating the harmonic oscillation response. Using the PZT thick-film cantilever, a strong harmonic oscillation with a quality (Q) factor of about 23 is demonstrated in water. The observation of strong harmonic oscillation in liquid implies the feasibility of precise real-time recognition of biomolecules using PZT thick-film cantilevers.

Original languageEnglish
Pages (from-to)2021-2028
Number of pages8
JournalAdvanced Functional Materials
Volume15
Issue number12
DOIs
Publication statusPublished - 2005 Dec 1
Externally publishedYes

Fingerprint

Thick films
thick films
harmonic oscillation
Fabrication
fabrication
sensors
Sensors
Thick film devices
Elastic moduli
modulus of elasticity
Screen printing
Liquids
Biomolecules
Substrates
liquids
MEMS
Melting point
Transducers
Natural frequencies
printing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Condensed Matter Physics
  • Electrochemistry

Cite this

Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr 0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics. / Park, Jae Hong; Kwon, Tae Yun; Yoon, Dae Sung; Kim, Hwan; Kim, Tae Song.

In: Advanced Functional Materials, Vol. 15, No. 12, 01.12.2005, p. 2021-2028.

Research output: Contribution to journalArticle

@article{fbcd54858bfb4177a32fe2e01eb7f745,
title = "Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr 0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics",
abstract = "The integration and the device realization of Pb(Zr, Ti)O3 (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thick-film devices on Si warrant attention as they are appropriate for biological transducers; they generate large actuating forces and have a relatively high sensitivity for mass detection, especially in liquids. In this study, Pb(Zr0.52Ti0.48)O3 thick-film cantilever devices are successfully fabricated on a Pt/TiO2/SiN x/Si substrate using a screen-printing method and microelectromechanical systems (MEMS) process. Elastic and electromechanical properties such as the Young's modulus and transverse piezoelectric coefficient are determined from microstructural and electrical analyses for further mechanical study. The calculated Young's modulus of the thick film, 53.9 ± 3.85 GPa, corresponds to the resonant frequency obtained from the measured harmonic oscillation response. The transverse piezoelectric constant, d31, of -20.7 to -18.8 pCN-1 is comparable to that of a dense thin film. These values promise the possibility of determining the resonance properties of a thick-film cantilever by designing its structure and then simulating the harmonic oscillation response. Using the PZT thick-film cantilever, a strong harmonic oscillation with a quality (Q) factor of about 23 is demonstrated in water. The observation of strong harmonic oscillation in liquid implies the feasibility of precise real-time recognition of biomolecules using PZT thick-film cantilevers.",
author = "Park, {Jae Hong} and Kwon, {Tae Yun} and Yoon, {Dae Sung} and Hwan Kim and Kim, {Tae Song}",
year = "2005",
month = "12",
day = "1",
doi = "10.1002/adfm.200500331",
language = "English",
volume = "15",
pages = "2021--2028",
journal = "Advanced Functional Materials",
issn = "1616-301X",
publisher = "Wiley-VCH Verlag",
number = "12",

}

TY - JOUR

T1 - Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr 0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics

AU - Park, Jae Hong

AU - Kwon, Tae Yun

AU - Yoon, Dae Sung

AU - Kim, Hwan

AU - Kim, Tae Song

PY - 2005/12/1

Y1 - 2005/12/1

N2 - The integration and the device realization of Pb(Zr, Ti)O3 (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thick-film devices on Si warrant attention as they are appropriate for biological transducers; they generate large actuating forces and have a relatively high sensitivity for mass detection, especially in liquids. In this study, Pb(Zr0.52Ti0.48)O3 thick-film cantilever devices are successfully fabricated on a Pt/TiO2/SiN x/Si substrate using a screen-printing method and microelectromechanical systems (MEMS) process. Elastic and electromechanical properties such as the Young's modulus and transverse piezoelectric coefficient are determined from microstructural and electrical analyses for further mechanical study. The calculated Young's modulus of the thick film, 53.9 ± 3.85 GPa, corresponds to the resonant frequency obtained from the measured harmonic oscillation response. The transverse piezoelectric constant, d31, of -20.7 to -18.8 pCN-1 is comparable to that of a dense thin film. These values promise the possibility of determining the resonance properties of a thick-film cantilever by designing its structure and then simulating the harmonic oscillation response. Using the PZT thick-film cantilever, a strong harmonic oscillation with a quality (Q) factor of about 23 is demonstrated in water. The observation of strong harmonic oscillation in liquid implies the feasibility of precise real-time recognition of biomolecules using PZT thick-film cantilevers.

AB - The integration and the device realization of Pb(Zr, Ti)O3 (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thick-film devices on Si warrant attention as they are appropriate for biological transducers; they generate large actuating forces and have a relatively high sensitivity for mass detection, especially in liquids. In this study, Pb(Zr0.52Ti0.48)O3 thick-film cantilever devices are successfully fabricated on a Pt/TiO2/SiN x/Si substrate using a screen-printing method and microelectromechanical systems (MEMS) process. Elastic and electromechanical properties such as the Young's modulus and transverse piezoelectric coefficient are determined from microstructural and electrical analyses for further mechanical study. The calculated Young's modulus of the thick film, 53.9 ± 3.85 GPa, corresponds to the resonant frequency obtained from the measured harmonic oscillation response. The transverse piezoelectric constant, d31, of -20.7 to -18.8 pCN-1 is comparable to that of a dense thin film. These values promise the possibility of determining the resonance properties of a thick-film cantilever by designing its structure and then simulating the harmonic oscillation response. Using the PZT thick-film cantilever, a strong harmonic oscillation with a quality (Q) factor of about 23 is demonstrated in water. The observation of strong harmonic oscillation in liquid implies the feasibility of precise real-time recognition of biomolecules using PZT thick-film cantilevers.

UR - http://www.scopus.com/inward/record.url?scp=29144436612&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=29144436612&partnerID=8YFLogxK

U2 - 10.1002/adfm.200500331

DO - 10.1002/adfm.200500331

M3 - Article

VL - 15

SP - 2021

EP - 2028

JO - Advanced Functional Materials

JF - Advanced Functional Materials

SN - 1616-301X

IS - 12

ER -