Fabrication of moth-eye structure on p-GaN layer of GaN-based LEDs for improvement of light extraction

Eun Ju Hong, Kyeong Jae Byeon, Hyoungwon Park, Jaeyeon Hwang, Heon Lee, Kyungwoo Choi, Gun Young Jung

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

Moth-eye structures were produced on a p-GaN top cladding layer by UV imprint and inductively coupled plasma (ICP) etch processes in order to improve the light extraction efficiency of GaN-based green light-emitting diodes (LEDs). The height and shape of moth-eye structures were adjusted by controlling the thickness of Cr mask layer and ICP etching time. The transmittance of LED device stacks with moth-eye structure was increased up to 1.5-2.5 times, compared to identical LED sample without moth-eye structure and the intensity of photoluminescence from the InGaN multi-quantum well layer of LED sample with moth-eye structure was 5-7 times higher than that of the LED sample without the moth-eye structure.

Original languageEnglish
Pages (from-to)170-173
Number of pages4
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Volume163
Issue number3
DOIs
Publication statusPublished - 2009 Jul 25

Fingerprint

moths
Light emitting diodes
light emitting diodes
Fabrication
fabrication
Inductively coupled plasma
Plasma etching
Semiconductor quantum wells
plasma etching
Masks
Photoluminescence
transmittance
masks
quantum wells
photoluminescence

Keywords

  • GaN
  • Green LED
  • Moth-eye structure
  • Nanoimprint lithography
  • Photoluminescence
  • Photon extraction efficiency

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Fabrication of moth-eye structure on p-GaN layer of GaN-based LEDs for improvement of light extraction. / Hong, Eun Ju; Byeon, Kyeong Jae; Park, Hyoungwon; Hwang, Jaeyeon; Lee, Heon; Choi, Kyungwoo; Jung, Gun Young.

In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, Vol. 163, No. 3, 25.07.2009, p. 170-173.

Research output: Contribution to journalArticle

Hong, Eun Ju ; Byeon, Kyeong Jae ; Park, Hyoungwon ; Hwang, Jaeyeon ; Lee, Heon ; Choi, Kyungwoo ; Jung, Gun Young. / Fabrication of moth-eye structure on p-GaN layer of GaN-based LEDs for improvement of light extraction. In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 2009 ; Vol. 163, No. 3. pp. 170-173.
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