Fabrication of multilayer passive electric components using inkjet printing and low temperature laser processing on polymer

Seung Hwan Ko, Jaewon Chung, Heng Pan, Costas P. Grigoropoulos, Dimos Poulikakos

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

The low temperature fabrication of passive electrical components (conductor, capacitor) on the flexible polymer substrate is presented in this paper. A drop-on-demand (DOD) ink-jetting system was used to print gold nano-particles suspended in Alpha-Terpineol solvent and PVP in PGMEA solvent to fabricate passive electrical components on flexible polymer substrate. Short pulsed laser ablation enabled finer electrical components to overcome limitation of inkjet process. Continuous Argon ion laser was irradiated locally to evaporate carrier solvent as well as to sinter gold nano-particles. In addition, a self alignment technique for PVP layer was demonstrated taking advantage of the deliberate modification of surface wetting characteristics. Finally, a new selective ablation of multilayered gold nanoparticle film was demonstrated using the ablation threshold difference for sintered and non sintered gold nanoparticles.

Original languageEnglish
Title of host publicationPhoton Processing in Microelectronics and Photonics V
DOIs
Publication statusPublished - 2006
EventPhoton Processing in Microelectronics and Photonics V - San Jose, CA, United States
Duration: 2006 Jan 232006 Jan 26

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6106
ISSN (Print)0277-786X

Other

OtherPhoton Processing in Microelectronics and Photonics V
CountryUnited States
CitySan Jose, CA
Period06/1/2306/1/26

Keywords

  • Flexible electronics
  • Inkjet printing
  • Laser ablation and sintering
  • NALSA (nanomaterial assisted laser sintering and ablation)
  • Nanoparticle
  • SPLA-DAT (selective pulsed laser ablation by different ablation threshold) multilayer processing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Ko, S. H., Chung, J., Pan, H., Grigoropoulos, C. P., & Poulikakos, D. (2006). Fabrication of multilayer passive electric components using inkjet printing and low temperature laser processing on polymer. In Photon Processing in Microelectronics and Photonics V [61060E] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6106). https://doi.org/10.1117/12.647872