Fabrication of nano-scale phase change materials using nanoimprint lithography and reactive ion etching process

Ki Yeon Yang, Jong Woo Kim, Sung Hoon Hong, Jae Yeon Hwang, Heon Lee

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication of nano-scale phase change materials using nanoimprint lithography and reactive ion etching process'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds