Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography

Ki Yeon Yang; Sung Hoon Hong; Heon Lee; Jeong Woo Choi

doi:10.4028/0-87849-995-4.446

Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography

Ki Yeon Yang, Sung Hoon Hong, Heon Lee, Jeong Woo Choi

Department of Materials Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

UV nano imprint lithography (UV NIL) that uses a monomer based UV curable monomer resin is proposed as a method of imprinting at low temperature and pressure. The fabrication of high fidelity patterns on a topographical substrate is a formidable challenge. To accomplish this, the use of bi-layer nano imprint lithography, which involves the use of an easily removable under-layer and an imprinted pattern, is proposed. We hypothesized that by etching the under layer by oxygen RIE, we might be able to build the bi-layer patterns for easy lift-off and fabricate nano-sized metal patterns through this lift-off process.

Original language	English
Title of host publication	Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7
Publisher	Trans Tech Publications Ltd
Pages	446-449
Number of pages	4
ISBN (Print)	0878499954, 9780878499953
DOIs	https://doi.org/10.4028/0-87849-995-4.446
Publication status	Published - 2006
Event	7th International Symposium on Eco-Materials Processing and Design, ISEPD-7 - Chengdu, China Duration: 2006 Jan 8 → 2006 Jan 11

Publication series

Name	Materials Science Forum
Volume	510-511
ISSN (Print)	0255-5476
ISSN (Electronic)	1662-9752

Other

Other	7th International Symposium on Eco-Materials Processing and Design, ISEPD-7
Country/Territory	China
City	Chengdu
Period	06/1/8 → 06/1/11

Keywords

Bi-layer imprinting
LOL ™2000
Lift-off
UV nano imprint lithography

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.4028/0-87849-995-4.446

Cite this

Yang, K. Y., Hong, S. H., Lee, H., & Choi, J. W. (2006). Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography. In Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7 (pp. 446-449). (Materials Science Forum; Vol. 510-511). Trans Tech Publications Ltd. https://doi.org/10.4028/0-87849-995-4.446

Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography. / Yang, Ki Yeon; Hong, Sung Hoon; Lee, Heon; Choi, Jeong Woo.

Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7. Trans Tech Publications Ltd, 2006. p. 446-449 (Materials Science Forum; Vol. 510-511).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yang, KY, Hong, SH, Lee, H & Choi, JW 2006, Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography. in Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7. Materials Science Forum, vol. 510-511, Trans Tech Publications Ltd, pp. 446-449, 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7, Chengdu, China, 06/1/8. https://doi.org/10.4028/0-87849-995-4.446

Yang KY, Hong SH, Lee H, Choi JW. Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography. In Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7. Trans Tech Publications Ltd. 2006. p. 446-449. (Materials Science Forum). https://doi.org/10.4028/0-87849-995-4.446

Yang, Ki Yeon ; Hong, Sung Hoon ; Lee, Heon ; Choi, Jeong Woo. / Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography. Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7. Trans Tech Publications Ltd, 2006. pp. 446-449 (Materials Science Forum).

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abstract = "UV nano imprint lithography (UV NIL) that uses a monomer based UV curable monomer resin is proposed as a method of imprinting at low temperature and pressure. The fabrication of high fidelity patterns on a topographical substrate is a formidable challenge. To accomplish this, the use of bi-layer nano imprint lithography, which involves the use of an easily removable under-layer and an imprinted pattern, is proposed. We hypothesized that by etching the under layer by oxygen RIE, we might be able to build the bi-layer patterns for easy lift-off and fabricate nano-sized metal patterns through this lift-off process.",

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AB - UV nano imprint lithography (UV NIL) that uses a monomer based UV curable monomer resin is proposed as a method of imprinting at low temperature and pressure. The fabrication of high fidelity patterns on a topographical substrate is a formidable challenge. To accomplish this, the use of bi-layer nano imprint lithography, which involves the use of an easily removable under-layer and an imprinted pattern, is proposed. We hypothesized that by etching the under layer by oxygen RIE, we might be able to build the bi-layer patterns for easy lift-off and fabricate nano-sized metal patterns through this lift-off process.

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Fabrication of nano-sized gold dot array using Bi-layer nano imprint lithography

Abstract

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Keywords

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