Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography

Seon Yong Hwang, Ho Yong Jung, Jun Ho Jeong, Heon Lee

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Polymer films are widely used as a substrate for displays and for solar cells since they are cheap, transparent and flexible, and their material properties are easy to design. Polyethylene-terephthalate (PET) is especially useful for various applications requiring transparency, flexibility and good thermal and chemical resistance. In this study, nano-sized metal patterns were fabricated on flexible PET film by using nanoimprint lithography (NIL). Water-soluble poly-vinyl alcohol (PVA) resin was used as a planarization and sacrificial layer for the lift-off process, as it does not damage the PET films and can easily be etched off by using oxygen plasma. NIL was used to fabricate the nano-sized patterns on the non-planar or flexible substrate. Finally, a nano-sized metal pattern was successfully formed by depositing the metal layer over the imprinted resist patterns and applying the lift-off process, which is economic and environmentally friendly, to the PET films.

Original languageEnglish
Pages (from-to)4104-4107
Number of pages4
JournalThin Solid Films
Volume517
Issue number14
DOIs
Publication statusPublished - 2009 May 29

Fingerprint

Nanoimprint lithography
Polyethylene Terephthalates
polyethylene terephthalate
Polyethylene terephthalates
lithography
Metals
Fabrication
fabrication
Substrates
metals
Chemical resistance
oxygen plasma
thermal resistance
Polymer films
Heat resistance
Transparency
resins
economics
Materials properties
Solar cells

Keywords

  • Bi-layer imprint
  • Flexible substrate
  • Metal nano-pattern
  • PET (polyethylene-terephthalate)
  • PVA (poly-vinyl alcohol)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography. / Hwang, Seon Yong; Jung, Ho Yong; Jeong, Jun Ho; Lee, Heon.

In: Thin Solid Films, Vol. 517, No. 14, 29.05.2009, p. 4104-4107.

Research output: Contribution to journalArticle

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