Fabrication of nanodot arrays on Si by pulsed laser deposition using anodic aluminum oxide nanopore membrane as mask

Woosung Nam, Hyejin Seo, Sung Chan Park, Chang Hyun Bae, Sang Hwan Nam, Seung Min Park, Jeong Sook Ha

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18 Citations (Scopus)


We demonstrate the fabrication of metal and semiconductor nanodot arrays on Si by pulsed laser deposition using an anodic alumina membrane as a mask. A Hexagonal-close-packed nanopore membrane mask was fabricated by the anodic oxidation of aluminum sheet. Pulsed laser deposition of Ag, Ni, ZnO, and Er-doped Si (Si:Er) nanodots was performed on a Si substrate to which an alumina membrane mask adheres by van der Waals interaction. Highly ordered arrays of Ag, Ni, ZnO, and Si:Er nanodots with average diameters ranging from 55 to 86 nm and a periodicity of ∼100 nm were obtained. Also, the time-resolved images of laser-produced plasma plumes were analyzed to examine the dynamical properties of the ejected materials.

Original languageEnglish
Pages (from-to)7793-7797
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number11 A
Publication statusPublished - 2004 Nov 1



  • Anodic aluminum oxide
  • Nanodot array
  • Pulsed laser deposition

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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