Abstract
We demonstrate the fabrication of metal and semiconductor nanodot arrays on Si by pulsed laser deposition using an anodic alumina membrane as a mask. A Hexagonal-close-packed nanopore membrane mask was fabricated by the anodic oxidation of aluminum sheet. Pulsed laser deposition of Ag, Ni, ZnO, and Er-doped Si (Si:Er) nanodots was performed on a Si substrate to which an alumina membrane mask adheres by van der Waals interaction. Highly ordered arrays of Ag, Ni, ZnO, and Si:Er nanodots with average diameters ranging from 55 to 86 nm and a periodicity of ∼100 nm were obtained. Also, the time-resolved images of laser-produced plasma plumes were analyzed to examine the dynamical properties of the ejected materials.
| Original language | English |
|---|---|
| Pages (from-to) | 7793-7797 |
| Number of pages | 5 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 43 |
| Issue number | 11 A |
| DOIs | |
| Publication status | Published - 2004 Nov 1 |
Fingerprint
Keywords
- Anodic aluminum oxide
- Nanodot array
- Pulsed laser deposition
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Fabrication of nanodot arrays on Si by pulsed laser deposition using anodic aluminum oxide nanopore membrane as mask. / Nam, Woosung; Seo, Hyejin; Park, Sung Chan; Bae, Chang Hyun; Nam, Sang Hwan; Park, Seung Min; Ha, Jeong Sook.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 11 A, 01.11.2004, p. 7793-7797.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication of nanodot arrays on Si by pulsed laser deposition using anodic aluminum oxide nanopore membrane as mask
AU - Nam, Woosung
AU - Seo, Hyejin
AU - Park, Sung Chan
AU - Bae, Chang Hyun
AU - Nam, Sang Hwan
AU - Park, Seung Min
AU - Ha, Jeong Sook
PY - 2004/11/1
Y1 - 2004/11/1
N2 - We demonstrate the fabrication of metal and semiconductor nanodot arrays on Si by pulsed laser deposition using an anodic alumina membrane as a mask. A Hexagonal-close-packed nanopore membrane mask was fabricated by the anodic oxidation of aluminum sheet. Pulsed laser deposition of Ag, Ni, ZnO, and Er-doped Si (Si:Er) nanodots was performed on a Si substrate to which an alumina membrane mask adheres by van der Waals interaction. Highly ordered arrays of Ag, Ni, ZnO, and Si:Er nanodots with average diameters ranging from 55 to 86 nm and a periodicity of ∼100 nm were obtained. Also, the time-resolved images of laser-produced plasma plumes were analyzed to examine the dynamical properties of the ejected materials.
AB - We demonstrate the fabrication of metal and semiconductor nanodot arrays on Si by pulsed laser deposition using an anodic alumina membrane as a mask. A Hexagonal-close-packed nanopore membrane mask was fabricated by the anodic oxidation of aluminum sheet. Pulsed laser deposition of Ag, Ni, ZnO, and Er-doped Si (Si:Er) nanodots was performed on a Si substrate to which an alumina membrane mask adheres by van der Waals interaction. Highly ordered arrays of Ag, Ni, ZnO, and Si:Er nanodots with average diameters ranging from 55 to 86 nm and a periodicity of ∼100 nm were obtained. Also, the time-resolved images of laser-produced plasma plumes were analyzed to examine the dynamical properties of the ejected materials.
KW - Anodic aluminum oxide
KW - Nanodot array
KW - Pulsed laser deposition
UR - http://www.scopus.com/inward/record.url?scp=11144223714&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=11144223714&partnerID=8YFLogxK
U2 - 10.1143/JJAP.43.7793
DO - 10.1143/JJAP.43.7793
M3 - Article
AN - SCOPUS:11144223714
VL - 43
SP - 7793
EP - 7797
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 11 A
ER -