Fabrication of nanosize patterned substrates using nano imprinting lithography

Heon Lee, Sunghoon Hong, Giyeon Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Three different kinds of imprinting lithography techniques UV curing imprinting, thermally curing imprinting with monomer resin, and hot embossing imprinting with polymer resin were used to transfer as small as 70nm patterns of template onto the various substrates including Si wafer, oxidized Si wafer, quartz wafer, glass plate, PET (Polyethylene Terephthalate) film, ITO (Indium Tin Oxide) coated PET, and Al foil. High fidelity pattern transferring was observed in all cases. It is shown that nano-imprinting lithography is one of the most promising techniques to fabricate nanosize patterns on various substrates.

Original languageEnglish
Title of host publication2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology
Pages237-240
Number of pages4
DOIs
Publication statusPublished - 2005 Dec 1
Event2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology - Oahu, HI, United States
Duration: 2005 May 122005 May 15

Publication series

Name2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology
Volume2005

Other

Other2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology
CountryUnited States
CityOahu, HI
Period05/5/1205/5/15

Keywords

  • Hot embossing nano-imprinting lithography
  • Nanopatterned substrate
  • Polyethylene terephthalate
  • Polymethylmethacrylate
  • Resin
  • Template
  • UV curing nanoimprinting lithography

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Lee, H., Hong, S., & Yang, G. (2005). Fabrication of nanosize patterned substrates using nano imprinting lithography. In 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology (pp. 237-240). [1548437] (2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology; Vol. 2005). https://doi.org/10.1109/MMB.2005.1548437