Fabrication of polycrystalline TiO₂ nanopatterns by TiO₂ sol base imprint lithography

Engineering & Materials Science

• Sols 100%
• Lithography 78%
• Gels 75%
• Polydimethylsiloxane 60%
• Fabrication 53%
• Nanoimprint lithography 37%
• Sol-gel process 32%
• Transmission electron microscopy 24%
• Ethanol 24%
• Annealing 23%
• X ray diffraction 23%
• Resins 21%
• Scanning electron microscopy 18%

Physics & Astronomy

• lithography 60%
• fabrication 43%
• gels 37%
• resins 12%
• ethyl alcohol 11%
• templates 11%
• wafers 9%
• transmission electron microscopy 7%
• scanning electron microscopy 7%
• annealing 7%
• diffraction 6%
• x rays 5%

Chemical Compounds

• Sol 67%
• Polycrystalline Solid 64%
• Gel 16%
• Sol Gel Process 7%
• Annealing 7%
• Transmission Electron Microscopy 5%
• Scanning Electron Microscopy 5%