Abstract
We designed and fabricated a micro-electromechanical system based standard calibration sample to be used for performing atomic force microscopic measurements. The conventional calibration sample of atomic force microscope exhibits disadvantages in terms of its long-term reliability and durability owing to its simple and limited pattern shapes and sizes. In this study, we fabricated a sample with three cross patterns on a 2-inch insulating glass wafer employing conductive materials. The pattern was designed with a broader line width (5 Μm) and a lower height (20 nm) as compared with those of conventional calibration samples. The exact dimensions of the standard calibration sample were examined using surface profile, current mapping, surface potential mapping, and electrostatic mapping images recorded with atomic force microscopy. Highly reliable atomic force microscopic data can be acquired using our proposed standard calibration sample.
| Original language | English |
|---|---|
| Pages (from-to) | 7783-7787 |
| Number of pages | 5 |
| Journal | Journal of Nanoscience and Nanotechnology |
| Volume | 17 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2017 Oct 1 |
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Keywords
- MEMS Atomic Force Microscope
- Standard Calibration Sample
ASJC Scopus subject areas
- Bioengineering
- Chemistry(all)
- Biomedical Engineering
- Materials Science(all)
- Condensed Matter Physics
Cite this
Fabrication of standard calibration samples for highly reliable atomic force microscope measurements. / Park, Tae Hoon; Park, Ju Hyun; Jeon, Dong Su; Kim, Yong Kyun; Min, Chi Hong; Yu, Jae Heung; Kim, Tae Geun.
In: Journal of Nanoscience and Nanotechnology, Vol. 17, No. 10, 01.10.2017, p. 7783-7787.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication of standard calibration samples for highly reliable atomic force microscope measurements
AU - Park, Tae Hoon
AU - Park, Ju Hyun
AU - Jeon, Dong Su
AU - Kim, Yong Kyun
AU - Min, Chi Hong
AU - Yu, Jae Heung
AU - Kim, Tae Geun
PY - 2017/10/1
Y1 - 2017/10/1
N2 - We designed and fabricated a micro-electromechanical system based standard calibration sample to be used for performing atomic force microscopic measurements. The conventional calibration sample of atomic force microscope exhibits disadvantages in terms of its long-term reliability and durability owing to its simple and limited pattern shapes and sizes. In this study, we fabricated a sample with three cross patterns on a 2-inch insulating glass wafer employing conductive materials. The pattern was designed with a broader line width (5 Μm) and a lower height (20 nm) as compared with those of conventional calibration samples. The exact dimensions of the standard calibration sample were examined using surface profile, current mapping, surface potential mapping, and electrostatic mapping images recorded with atomic force microscopy. Highly reliable atomic force microscopic data can be acquired using our proposed standard calibration sample.
AB - We designed and fabricated a micro-electromechanical system based standard calibration sample to be used for performing atomic force microscopic measurements. The conventional calibration sample of atomic force microscope exhibits disadvantages in terms of its long-term reliability and durability owing to its simple and limited pattern shapes and sizes. In this study, we fabricated a sample with three cross patterns on a 2-inch insulating glass wafer employing conductive materials. The pattern was designed with a broader line width (5 Μm) and a lower height (20 nm) as compared with those of conventional calibration samples. The exact dimensions of the standard calibration sample were examined using surface profile, current mapping, surface potential mapping, and electrostatic mapping images recorded with atomic force microscopy. Highly reliable atomic force microscopic data can be acquired using our proposed standard calibration sample.
KW - MEMS Atomic Force Microscope
KW - Standard Calibration Sample
UR - http://www.scopus.com/inward/record.url?scp=85025603113&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85025603113&partnerID=8YFLogxK
U2 - 10.1166/jnn.2017.14842
DO - 10.1166/jnn.2017.14842
M3 - Article
AN - SCOPUS:85025603113
VL - 17
SP - 7783
EP - 7787
JO - Journal of Nanoscience and Nanotechnology
JF - Journal of Nanoscience and Nanotechnology
SN - 1533-4880
IS - 10
ER -