Fabrication of standard calibration samples for highly reliable atomic force microscope measurements

Tae Hoon Park, Ju Hyun Park, Dong Su Jeon, Yong Kyun Kim, Chi Hong Min, Jae Heung Yu, Tae Geun Kim

Research output: Contribution to journalArticle

Abstract

We designed and fabricated a micro-electromechanical system based standard calibration sample to be used for performing atomic force microscopic measurements. The conventional calibration sample of atomic force microscope exhibits disadvantages in terms of its long-term reliability and durability owing to its simple and limited pattern shapes and sizes. In this study, we fabricated a sample with three cross patterns on a 2-inch insulating glass wafer employing conductive materials. The pattern was designed with a broader line width (5 Μm) and a lower height (20 nm) as compared with those of conventional calibration samples. The exact dimensions of the standard calibration sample were examined using surface profile, current mapping, surface potential mapping, and electrostatic mapping images recorded with atomic force microscopy. Highly reliable atomic force microscopic data can be acquired using our proposed standard calibration sample.

Original languageEnglish
Pages (from-to)7783-7787
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Volume17
Issue number10
DOIs
Publication statusPublished - 2017 Oct 1

Fingerprint

Calibration
Microscopes
microscopes
Fabrication
fabrication
Conductive materials
Atomic Force Microscopy
Surface potential
Static Electricity
Linewidth
MEMS
Glass
Electrostatics
Atomic force microscopy
durability
Durability
microelectromechanical systems
atomic force microscopy
wafers
electrostatics

Keywords

  • MEMS Atomic Force Microscope
  • Standard Calibration Sample

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Fabrication of standard calibration samples for highly reliable atomic force microscope measurements. / Park, Tae Hoon; Park, Ju Hyun; Jeon, Dong Su; Kim, Yong Kyun; Min, Chi Hong; Yu, Jae Heung; Kim, Tae Geun.

In: Journal of Nanoscience and Nanotechnology, Vol. 17, No. 10, 01.10.2017, p. 7783-7787.

Research output: Contribution to journalArticle

Park, Tae Hoon ; Park, Ju Hyun ; Jeon, Dong Su ; Kim, Yong Kyun ; Min, Chi Hong ; Yu, Jae Heung ; Kim, Tae Geun. / Fabrication of standard calibration samples for highly reliable atomic force microscope measurements. In: Journal of Nanoscience and Nanotechnology. 2017 ; Vol. 17, No. 10. pp. 7783-7787.
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