Fabrication of superhydrophobic and oleophobic surfaces with overhang structure by reverse nanoimprint lithography

Hak Jong Choi, Soyoung Choo, Ju Hyeon Shin, Kang In Kim, Heon Lee

Research output: Contribution to journalArticle

93 Citations (Scopus)

Abstract

This work reports the fabrication of superhydrophobic and oleophobic surfaces with an overhang structure by reverse nanoimprint lithography. An overhang structure is difficult to fabricate by conventional lithography; however, it was conveniently formed by reverse imprint lithography, employed in conjunction with reactive ion etching. The obtained overhang structure was coated with a fluoroalkylsilane monolayer to reduce its surface energy. Further, four different types of nanopatterns were separately embedded on the surface of the obtained overhang structure by modified reverse imprint lithography to enhance its oil-repelling properties. The embedded nanopatterns resulted in different overhang angles, thereby enhancing the oil-repelling properties. The morphology and wetting characteristics of the overhang structure were investigated by scanning electron microscopy and contact angle measurements. This study demonstrates that an overhang structure can be successfully fabricated on a substrate by reverse nanoimprint lithography; moreover, oleophobic structures can be realized using materials with contact angles <90

Original languageEnglish
Pages (from-to)24354-24359
Number of pages6
JournalJournal of Physical Chemistry C
Volume117
Issue number46
DOIs
Publication statusPublished - 2013 Nov 21

Fingerprint

Nanoimprint lithography
Lithography
lithography
Fabrication
fabrication
Contact angle
Oils
Reactive ion etching
Angle measurement
Interfacial energy
oils
Wetting
Monolayers
Scanning electron microscopy
wetting
surface energy
Substrates
etching
scanning electron microscopy
ions

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Energy(all)

Cite this

Fabrication of superhydrophobic and oleophobic surfaces with overhang structure by reverse nanoimprint lithography. / Choi, Hak Jong; Choo, Soyoung; Shin, Ju Hyeon; Kim, Kang In; Lee, Heon.

In: Journal of Physical Chemistry C, Vol. 117, No. 46, 21.11.2013, p. 24354-24359.

Research output: Contribution to journalArticle

Choi, Hak Jong ; Choo, Soyoung ; Shin, Ju Hyeon ; Kim, Kang In ; Lee, Heon. / Fabrication of superhydrophobic and oleophobic surfaces with overhang structure by reverse nanoimprint lithography. In: Journal of Physical Chemistry C. 2013 ; Vol. 117, No. 46. pp. 24354-24359.
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