Fabrication of suspended bridge type resonator using laser interference lithography

Boyeon Hwang, In Sang Song, Jung ho Park, Jea Shik Shin, Jae-Sung Rieh, Sung Woo Hwang, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report the fabrication method of suspended bridge type nanoelectromechanical system (NEMS) resonator for high quality factor (Q-factor) and increase in resonance frequency beyond the ultra-high frequency (UHF) by laser interference lithography (LIL) using silicon-on-insulator wafer. LIL is capable of a fast nano-patterning over a large area and does not require a mask. In fabricating a suspended bridge type structure, parameter effects such as exposure dosage and the half angle between two incident beams at the intersection were explored. In this paper, successful fabrication of suspended bridge type NEMS resonator is presented using 257nm wavelength laser LIL.

Original languageEnglish
Title of host publicationEuropean Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012
Pages524-527
Number of pages4
Publication statusPublished - 2012 Dec 1
Event7th European Microwave Integrated Circuits Conference, EuMIC 2012 - Held as Part of 15th European Microwave Week, EuMW 2012 - Amsterdam, Netherlands
Duration: 2012 Oct 292012 Oct 30

Other

Other7th European Microwave Integrated Circuits Conference, EuMIC 2012 - Held as Part of 15th European Microwave Week, EuMW 2012
CountryNetherlands
CityAmsterdam
Period12/10/2912/10/30

Fingerprint

Laser resonators
Lithography
NEMS
Fabrication
Lasers
Resonators
Masks
Silicon
Wavelength

Keywords

  • Laser Interference Lithography
  • NEMS
  • Resonator

ASJC Scopus subject areas

  • Hardware and Architecture

Cite this

Hwang, B., Song, I. S., Park, J. H., Shin, J. S., Rieh, J-S., Hwang, S. W., & Ju, B. K. (2012). Fabrication of suspended bridge type resonator using laser interference lithography. In European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012 (pp. 524-527). [6483852]

Fabrication of suspended bridge type resonator using laser interference lithography. / Hwang, Boyeon; Song, In Sang; Park, Jung ho; Shin, Jea Shik; Rieh, Jae-Sung; Hwang, Sung Woo; Ju, Byeong Kwon.

European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012. 2012. p. 524-527 6483852.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hwang, B, Song, IS, Park, JH, Shin, JS, Rieh, J-S, Hwang, SW & Ju, BK 2012, Fabrication of suspended bridge type resonator using laser interference lithography. in European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012., 6483852, pp. 524-527, 7th European Microwave Integrated Circuits Conference, EuMIC 2012 - Held as Part of 15th European Microwave Week, EuMW 2012, Amsterdam, Netherlands, 12/10/29.
Hwang B, Song IS, Park JH, Shin JS, Rieh J-S, Hwang SW et al. Fabrication of suspended bridge type resonator using laser interference lithography. In European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012. 2012. p. 524-527. 6483852
Hwang, Boyeon ; Song, In Sang ; Park, Jung ho ; Shin, Jea Shik ; Rieh, Jae-Sung ; Hwang, Sung Woo ; Ju, Byeong Kwon. / Fabrication of suspended bridge type resonator using laser interference lithography. European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012. 2012. pp. 524-527
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