Fabrication of suspended single-walled carbon nanotubes via a direct lithographic route

Byung Seok Oh, Yo Sep Min, Eun Ju Bae, Donghun Kang, In Sun Jung, Cheol Seong Hwang, Young Keun Kim, Wanjun Park

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We report a fabrication method of suspended SWNTs between SiO2 pillars via a direct lithographic route using a simple mixture of catalyst precursor and conventional electron beam resist. The catalytic electron beam resist (Cat-ER) plays roles as both catalyst and ER for growth and alignment of CNTs, respectively. Since the Cat-ER pattern can be utilized as an etch mask to fabricate the pillar structure, the suspended nanotubes are compatibly obtained with current lithographic processes. The suspended nanotubes are characterized to be single-walled by intensity mapping of a radial breathing mode in two dimensions with resonant Raman spectroscopy.

Original languageEnglish
Pages (from-to)174-178
Number of pages5
JournalJournal of Materials Chemistry
Volume16
Issue number2
DOIs
Publication statusPublished - 2006

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Chemistry

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    Oh, B. S., Min, Y. S., Bae, E. J., Kang, D., Jung, I. S., Hwang, C. S., Kim, Y. K., & Park, W. (2006). Fabrication of suspended single-walled carbon nanotubes via a direct lithographic route. Journal of Materials Chemistry, 16(2), 174-178. https://doi.org/10.1039/b510742c