Fabrication of un-cooled infrared sensor using pyroelectric thin film

Yun Kwon Park, Byeong Kwon Ju, Heung Woo Park, Young Soo Yoon, Sang Seop Yom, Young Jei Oh, Jung ho Park, Sang Hee Suh, Myung Hwan Oh, Chul Ju Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In the conventional IR-sensors (infrared sensor), there are problems of needing cooler and sensing wavelength limitation. These problems can be achieved by using un-cooling thermal IR sensors. However, they raise the problems of the attack of pyroelectric thin film layer during the etching of sacrificial layer as well as the thermal isolation of the IR detection layer. In order to fabricate uncooled IR-sensor using pyroelectric film, multilayer should be prepared pyroelectric thin film and thermally isolating membrane structure of square-shaped microstructures. We used the direct bonding technique to avoid the thermal loss by silicon substrate and the attack of pyroelectric thin film by etchant of the sacrificial layer. Metallic Pt layer used as a top and a bottom electrodes were deposited by E-beam sputtering method, while pyroelectric thin films were prepared Sol-Gel techniques. Because the pyroelectric thin film with c-axial orientation raised thermal polarization without the polling, the more integrated capability could be achieved. We investigated the characteristics of the pyroelectric thin films.: P-E loop, dielectric constant, XRD (X-Ray Diffractometry) etc.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages356-363
Number of pages8
Volume3892
Publication statusPublished - 1999
Externally publishedYes
EventProceedings of the 1999 Device and Process Technologies for MEMS and Microelectronics - Royal Pines Resort, Aust
Duration: 1999 Oct 271999 Oct 29

Other

OtherProceedings of the 1999 Device and Process Technologies for MEMS and Microelectronics
CityRoyal Pines Resort, Aust
Period99/10/2799/10/29

Fingerprint

Infrared radiation
Fabrication
Thin films
fabrication
sensors
Sensors
thin films
attack
membrane structures
Membrane structures
etchants
Multilayer films
coolers
X ray diffraction analysis
Sol-gels
Sputtering
Etching
isolation
Permittivity
sputtering

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Park, Y. K., Ju, B. K., Park, H. W., Yoon, Y. S., Yom, S. S., Oh, Y. J., ... Kim, C. J. (1999). Fabrication of un-cooled infrared sensor using pyroelectric thin film. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3892, pp. 356-363). Society of Photo-Optical Instrumentation Engineers.

Fabrication of un-cooled infrared sensor using pyroelectric thin film. / Park, Yun Kwon; Ju, Byeong Kwon; Park, Heung Woo; Yoon, Young Soo; Yom, Sang Seop; Oh, Young Jei; Park, Jung ho; Suh, Sang Hee; Oh, Myung Hwan; Kim, Chul Ju.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3892 Society of Photo-Optical Instrumentation Engineers, 1999. p. 356-363.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, YK, Ju, BK, Park, HW, Yoon, YS, Yom, SS, Oh, YJ, Park, JH, Suh, SH, Oh, MH & Kim, CJ 1999, Fabrication of un-cooled infrared sensor using pyroelectric thin film. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3892, Society of Photo-Optical Instrumentation Engineers, pp. 356-363, Proceedings of the 1999 Device and Process Technologies for MEMS and Microelectronics, Royal Pines Resort, Aust, 99/10/27.
Park YK, Ju BK, Park HW, Yoon YS, Yom SS, Oh YJ et al. Fabrication of un-cooled infrared sensor using pyroelectric thin film. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3892. Society of Photo-Optical Instrumentation Engineers. 1999. p. 356-363
Park, Yun Kwon ; Ju, Byeong Kwon ; Park, Heung Woo ; Yoon, Young Soo ; Yom, Sang Seop ; Oh, Young Jei ; Park, Jung ho ; Suh, Sang Hee ; Oh, Myung Hwan ; Kim, Chul Ju. / Fabrication of un-cooled infrared sensor using pyroelectric thin film. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3892 Society of Photo-Optical Instrumentation Engineers, 1999. pp. 356-363
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