Facile and precise fabrication of 10-nm nanostructures on soft and hard substrates

Engineering & Materials Science

• Nanostructures 100%
• Fabrication 60%
• Substrates 57%
• Nanostructured materials 50%
• Graphene nanoribbon 33%
• Nanoimprint lithography 31%
• Atomic layer deposition 31%
• Polymethyl methacrylates 27%
• Polyethylene terephthalates 26%
• Molds 23%
• Nanotechnology 23%
• Alcohols 22%
• Etching 22%
• Annealing 20%
• Aluminum oxide 19%
• Ions 18%
• Defects 13%
• Hot Temperature 9%
• Costs 7%

Physics & Astronomy

• fabrication 49%
• nanotechnology 18%
• polyethylene terephthalate 18%
• alcohols 17%
• polymethyl methacrylate 17%
• atomic layer epitaxy 17%
• lithography 13%
• graphene 13%
• etching 12%
• high resolution 9%
• annealing 9%
• defects 9%
• ions 7%

Chemical Compounds

• Nanomaterial 51%
• Nanoribbon 23%
• Atomic Layer Epitaxy 23%
• Etching 18%
• Annealing 16%
• Graphene 14%
• Alcohol 12%
• Ion 8%