Facile and precise fabrication of 10-nm nanostructures on soft and hard substrates

Engineering & Materials Science

• Alcohols 22%
• Aluminum oxide 19%
• Annealing 20%
• Atomic layer deposition 31%
• Costs 7%
• Defects 13%
• Etching 22%
• Fabrication 60%
• Graphene nanoribbon 33%
• Hot Temperature 9%
• Ions 18%
• Molds 23%
• Nanoimprint lithography 31%
• Nanostructured materials 50%
• Nanostructures 100%
• Nanotechnology 23%
• Polyethylene terephthalates 26%
• Polymethyl methacrylates 27%
• Substrates 57%

Physics & Astronomy

• alcohols 17%
• annealing 9%
• atomic layer epitaxy 17%
• defects 9%
• etching 12%
• fabrication 49%
• graphene 13%
• high resolution 9%
• ions 7%
• lithography 13%
• nanotechnology 18%
• polyethylene terephthalate 18%
• polymethyl methacrylate 17%

Chemical Compounds

• Alcohol 12%
• Annealing 16%
• Atomic Layer Epitaxy 23%
• Etching 18%
• Graphene 14%
• Ion 8%
• Nanomaterial 51%
• Nanoribbon 23%