Facile fabrication of close-packed microlens arrays using photoinduced surface relief structures as templates

Seungwoo Lee, Yong Cheol Jeong, Jung Ki Park

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

We demonstrate the cost-effective and facile method of fabricating close-packed microlens arrays using photoinduced two-dimensional (2-D) surface relief structures as original templates. 2-D surface relief structures are produced by successive inscription of two beams interference patterns with different grating vectors on azopolymer films. The employed exposure dose of 1st inscription stage and 2nd inscription stage are optimized to obtain symmetrical modulation heights. These photoinduced 2-D surface relief structures on azopolymer films are used directly to mold PDMS, and PDMS molds were then transferred onto photopolymer to imprint microlens arrays. Using this method, tetragonally and hexagonally close-packed microlens arrays are successfully fabricated in rapid and cost-effective way.

Original languageEnglish
Pages (from-to)14550-14559
Number of pages10
JournalOptics Express
Volume15
Issue number22
DOIs
Publication statusPublished - 2007 Oct 29

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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