Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications

Dong Sun Kim, Chun Bae Lim, Seung Won Jung, Du Seok Oh, Hyung Tae Kim, Won Joon Ho, Ju Young Jung, Jong Pil Shim, Tae Young Kim, Kwang S. Suh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Optical microscope and FIB were widely used to find out defect locations in display panels. But failure analysis of LTPS TFTs is getting more difficult to detect the locations than that of (a-Si:H) TFTs. We adopted FIB and EMMI tool and found the leakage path on some special function failure such as line defect in display panel. Analysis results would help to find out defects and improve the yield by introducing right analysis method of FIB/EMMI tools in display panels.

Original languageEnglish
Title of host publication2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012
DOIs
Publication statusPublished - 2012
Event2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012 - Singapore, Singapore
Duration: 2012 Jul 22012 Jul 6

Publication series

NameProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Other

Other2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012
CountrySingapore
CitySingapore
Period12/7/212/7/6

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Kim, D. S., Lim, C. B., Jung, S. W., Oh, D. S., Kim, H. T., Ho, W. J., Jung, J. Y., Shim, J. P., Kim, T. Y., & Suh, K. S. (2012). Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications. In 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012 [6306314] (Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA). https://doi.org/10.1109/IPFA.2012.6306314