Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications

Dong Sun Kim, Chun Bae Lim, Seung Won Jung, Du Seok Oh, Hyung Tae Kim, Won Joon Ho, Ju Young Jung, Jong Pil Shim, Tae Young Kim, Kwang Suck Suh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Optical microscope and FIB were widely used to find out defect locations in display panels. But failure analysis of LTPS TFTs is getting more difficult to detect the locations than that of (a-Si:H) TFTs. We adopted FIB and EMMI tool and found the leakage path on some special function failure such as line defect in display panel. Analysis results would help to find out defects and improve the yield by introducing right analysis method of FIB/EMMI tools in display panels.

Original languageEnglish
Title of host publicationProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
DOIs
Publication statusPublished - 2012 Nov 19
Event2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012 - Singapore, Singapore
Duration: 2012 Jul 22012 Jul 6

Other

Other2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012
CountrySingapore
CitySingapore
Period12/7/212/7/6

Fingerprint

Organic light emitting diodes (OLED)
Failure analysis
Display devices
Silicon
Defects
Temperature
Microscopes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Kim, D. S., Lim, C. B., Jung, S. W., Oh, D. S., Kim, H. T., Ho, W. J., ... Suh, K. S. (2012). Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications. In Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA [6306314] https://doi.org/10.1109/IPFA.2012.6306314

Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications. / Kim, Dong Sun; Lim, Chun Bae; Jung, Seung Won; Oh, Du Seok; Kim, Hyung Tae; Ho, Won Joon; Jung, Ju Young; Shim, Jong Pil; Kim, Tae Young; Suh, Kwang Suck.

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA. 2012. 6306314.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, DS, Lim, CB, Jung, SW, Oh, DS, Kim, HT, Ho, WJ, Jung, JY, Shim, JP, Kim, TY & Suh, KS 2012, Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications. in Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA., 6306314, 2012 19th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2012, Singapore, Singapore, 12/7/2. https://doi.org/10.1109/IPFA.2012.6306314
Kim DS, Lim CB, Jung SW, Oh DS, Kim HT, Ho WJ et al. Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications. In Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA. 2012. 6306314 https://doi.org/10.1109/IPFA.2012.6306314
Kim, Dong Sun ; Lim, Chun Bae ; Jung, Seung Won ; Oh, Du Seok ; Kim, Hyung Tae ; Ho, Won Joon ; Jung, Ju Young ; Shim, Jong Pil ; Kim, Tae Young ; Suh, Kwang Suck. / Failure analysis of latent damage in low temperature poly-silicon TFT for OLED applications. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA. 2012.
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