Fatigue test of AL-3%TI using axial loading testing machine for mems materials

Jun Hyub Park, Sung Hoon Choa, Hyeon Chang Choi, Man Sik Myung, Chang Seung Lee, Yun-Jae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens arc also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and-0.1514, respectively.

Original languageEnglish
Title of host publicationProceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
Pages1725-1730
Number of pages6
VolumePART C
Publication statusPublished - 2006 Feb 23
EventASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 - San Francisco, CA, United States
Duration: 2005 Jul 172005 Jul 22

Other

OtherASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
CountryUnited States
CitySan Francisco, CA
Period05/7/1705/7/22

Fingerprint

Fatigue of materials
Thin films
Testing
Mobile phones
MEMS
Switches
Fatigue strength

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Park, J. H., Choa, S. H., Choi, H. C., Myung, M. S., Lee, C. S., & Kim, Y-J. (2006). Fatigue test of AL-3%TI using axial loading testing machine for mems materials. In Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 (Vol. PART C, pp. 1725-1730)

Fatigue test of AL-3%TI using axial loading testing machine for mems materials. / Park, Jun Hyub; Choa, Sung Hoon; Choi, Hyeon Chang; Myung, Man Sik; Lee, Chang Seung; Kim, Yun-Jae.

Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. Vol. PART C 2006. p. 1725-1730.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, JH, Choa, SH, Choi, HC, Myung, MS, Lee, CS & Kim, Y-J 2006, Fatigue test of AL-3%TI using axial loading testing machine for mems materials. in Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. vol. PART C, pp. 1725-1730, ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005, San Francisco, CA, United States, 05/7/17.
Park JH, Choa SH, Choi HC, Myung MS, Lee CS, Kim Y-J. Fatigue test of AL-3%TI using axial loading testing machine for mems materials. In Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. Vol. PART C. 2006. p. 1725-1730
Park, Jun Hyub ; Choa, Sung Hoon ; Choi, Hyeon Chang ; Myung, Man Sik ; Lee, Chang Seung ; Kim, Yun-Jae. / Fatigue test of AL-3%TI using axial loading testing machine for mems materials. Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. Vol. PART C 2006. pp. 1725-1730
@inproceedings{cfa7c1028b1b40c4bb7e1c913293a9c8,
title = "Fatigue test of AL-3{\%}TI using axial loading testing machine for mems materials",
abstract = "This paper presents high cycle fatigue properties of an Al-3{\%}Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens arc also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and-0.1514, respectively.",
author = "Park, {Jun Hyub} and Choa, {Sung Hoon} and Choi, {Hyeon Chang} and Myung, {Man Sik} and Lee, {Chang Seung} and Yun-Jae Kim",
year = "2006",
month = "2",
day = "23",
language = "English",
isbn = "0791842002",
volume = "PART C",
pages = "1725--1730",
booktitle = "Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005",

}

TY - GEN

T1 - Fatigue test of AL-3%TI using axial loading testing machine for mems materials

AU - Park, Jun Hyub

AU - Choa, Sung Hoon

AU - Choi, Hyeon Chang

AU - Myung, Man Sik

AU - Lee, Chang Seung

AU - Kim, Yun-Jae

PY - 2006/2/23

Y1 - 2006/2/23

N2 - This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens arc also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and-0.1514, respectively.

AB - This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens arc also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and-0.1514, respectively.

UR - http://www.scopus.com/inward/record.url?scp=32844468559&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=32844468559&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:32844468559

SN - 0791842002

VL - PART C

SP - 1725

EP - 1730

BT - Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005

ER -