Fatigue test of AL-3%TI using axial loading testing machine for mems materials

Jun Hyub Park; Sung Hoon Choa; Hyeon Chang Choi; Man Sik Myung; Chang Seung Lee; Yun Jae Kim

Fatigue test of AL-3%TI using axial loading testing machine for mems materials

Jun Hyub Park, Sung Hoon Choa, Hyeon Chang Choi, Man Sik Myung, Chang Seung Lee, Yun Jae Kim

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens arc also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and-0.1514, respectively.

Original language	English
Title of host publication	Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems
Subtitle of host publication	Advances in Electronic Packaging 2005
Pages	1725-1730
Number of pages	6
Publication status	Published - 2006
Event	ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 - San Francisco, CA, United States Duration: 2005 Jul 17 → 2005 Jul 22

Publication series

Name	Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
Volume	PART C

Other

Other	ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
Country/Territory	United States
City	San Francisco, CA
Period	05/7/17 → 05/7/22

ASJC Scopus subject areas

Engineering(all)

Cite this

Park, J. H., Choa, S. H., Choi, H. C., Myung, M. S., Lee, C. S., & Kim, Y. J. (2006). Fatigue test of AL-3%TI using axial loading testing machine for mems materials. In Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 (pp. 1725-1730). (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005; Vol. PART C).

Fatigue test of AL-3%TI using axial loading testing machine for mems materials. / Park, Jun Hyub; Choa, Sung Hoon; Choi, Hyeon Chang; Myung, Man Sik; Lee, Chang Seung; Kim, Yun Jae.

Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. 2006. p. 1725-1730 (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005; Vol. PART C).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Park, JH, Choa, SH, Choi, HC, Myung, MS, Lee, CS & Kim, YJ 2006, Fatigue test of AL-3%TI using axial loading testing machine for mems materials. in Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005, vol. PART C, pp. 1725-1730, ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005, San Francisco, CA, United States, 05/7/17.

Park JH, Choa SH, Choi HC, Myung MS, Lee CS, Kim YJ. Fatigue test of AL-3%TI using axial loading testing machine for mems materials. In Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. 2006. p. 1725-1730. (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005).

Park, Jun Hyub ; Choa, Sung Hoon ; Choi, Hyeon Chang ; Myung, Man Sik ; Lee, Chang Seung ; Kim, Yun Jae. / Fatigue test of AL-3%TI using axial loading testing machine for mems materials. Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. 2006. pp. 1725-1730 (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005).

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abstract = "This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens arc also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and-0.1514, respectively.",

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AU - Lee, Chang Seung

AU - Kim, Yun Jae

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AB - This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens arc also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and-0.1514, respectively.

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BT - Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems

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Y2 - 17 July 2005 through 22 July 2005

ER -

Fatigue test of AL-3%TI using axial loading testing machine for mems materials

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