Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch

Jun Hyub Park, Chang Seung Lee, Yun-Jae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper presents high cycle fatigue properties of a Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1 μm and 480.0μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and -0.1514, respectively.

Original languageEnglish
Title of host publicationDiffusion and Defect Data Pt.B: Solid State Phenomena
Pages3-8
Number of pages6
Volume110
DOIs
Publication statusPublished - 2006 Dec 1
EventInternational Symposium on Safety and Structural Integrity - Singapore, Singapore
Duration: 2005 Jan 172005 Jan 20

Publication series

NameDiffusion and Defect Data Pt.B: Solid State Phenomena
Volume110
ISSN (Print)10120394

Other

OtherInternational Symposium on Safety and Structural Integrity
CountrySingapore
CitySingapore
Period05/1/1705/1/20

Fingerprint

fatigue tests
test equipment
microelectromechanical systems
MEMS
radio frequencies
switches
Switches
Fatigue of materials
Thin films
Testing
Mobile phones
cycles
tensile tests
thin films
exponents
coefficients
Fatigue strength

Keywords

  • Axial loading
  • Fatigue property
  • MEMS material
  • Static property

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Park, J. H., Lee, C. S., & Kim, Y-J. (2006). Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch. In Diffusion and Defect Data Pt.B: Solid State Phenomena (Vol. 110, pp. 3-8). (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 110). https://doi.org/10.4028/3-908451-15-9.3

Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch. / Park, Jun Hyub; Lee, Chang Seung; Kim, Yun-Jae.

Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 110 2006. p. 3-8 (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 110).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, JH, Lee, CS & Kim, Y-J 2006, Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch. in Diffusion and Defect Data Pt.B: Solid State Phenomena. vol. 110, Diffusion and Defect Data Pt.B: Solid State Phenomena, vol. 110, pp. 3-8, International Symposium on Safety and Structural Integrity, Singapore, Singapore, 05/1/17. https://doi.org/10.4028/3-908451-15-9.3
Park JH, Lee CS, Kim Y-J. Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch. In Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 110. 2006. p. 3-8. (Diffusion and Defect Data Pt.B: Solid State Phenomena). https://doi.org/10.4028/3-908451-15-9.3
Park, Jun Hyub ; Lee, Chang Seung ; Kim, Yun-Jae. / Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch. Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 110 2006. pp. 3-8 (Diffusion and Defect Data Pt.B: Solid State Phenomena).
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