Feasibility study of solvent recycle process in spin-on hard mask material manufacturing system

Hyun Jae Jeong, Kiho Park, Dae Ryook Yang

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Feasibility study of solvent recycle process in spin-on hard mask material manufacturing system'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds