Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

Kang H. Park, Jeongyong Kim, Jeong Sook Ha, Ki Bong Song

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

A reliable nanofabrication on Au cluster films using an atomic force microscope (AFM) was presented. Noncontact mode of AFM equipped with W 2C coated tip was used. Field emission current amounting to ∼500 pA was observed. Dots and lines having widths as small as 50 nm were created.

Original languageEnglish
Pages (from-to)1357-1360
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number4
Publication statusPublished - 2003 Jul 1

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Field emission
field emission
Nanostructures
Microscopes
microscopes
Fabrication
Thin films
fabrication
nanofabrication
thin films
Nanotechnology
Linewidth

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope. / Park, Kang H.; Kim, Jeongyong; Ha, Jeong Sook; Song, Ki Bong.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 4, 01.07.2003, p. 1357-1360.

Research output: Contribution to journalArticle

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