A reliable nanofabrication on Au cluster films using an atomic force microscope (AFM) was presented. Noncontact mode of AFM equipped with W 2C coated tip was used. Field emission current amounting to ∼500 pA was observed. Dots and lines having widths as small as 50 nm were created.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2003 Jul 1|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering