Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

Kang Ho Park; Jeongyong Kim; Jeong Sook Ha; Ki Bong Song

Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

Kang Ho Park, Jeongyong Kim, Jeong Sook Ha, Ki Bong Song

Department of Chemical and Biological Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

A reliable nanofabrication on Au cluster films using an atomic force microscope (AFM) was presented. Noncontact mode of AFM equipped with W ₂C coated tip was used. Field emission current amounting to ∼500 pA was observed. Dots and lines having widths as small as 50 nm were created.

Original language	English
Pages (from-to)	1357-1360
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	4
Publication status	Published - 2003 Jul

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

Cite this

Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope. / Park, Kang Ho; Kim, Jeongyong; Ha, Jeong Sook et al.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 4, 07.2003, p. 1357-1360.

Research output: Contribution to journal › Article › peer-review

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Field emission induced fabrication of nanostructures on Au thin films using a noncontact mode atomic force microscope

Abstract

ASJC Scopus subject areas

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