Field emission properties of ta-C films with nitrogen doping

Kyu Chang Park, Jong Hyun Moon, Suk Jae Chung, Jae Hoon Jung, Byeong Kwon Ju, Myung Hwan Oh, W. I. Milne, Min Koo Han, Jin Jang

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.

Original languageEnglish
Pages (from-to)431-433
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number2
Publication statusPublished - 1997 Mar 1
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

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    Park, K. C., Moon, J. H., Chung, S. J., Jung, J. H., Ju, B. K., Oh, M. H., Milne, W. I., Han, M. K., & Jang, J. (1997). Field emission properties of ta-C films with nitrogen doping. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 15(2), 431-433.