Field emission properties of ta-C films with nitrogen doping

Kyu Chang Park; Jong Hyun Moon; Suk Jae Chung; Jae Hoon Jung; Byeong Kwon Ju; Myung Hwan Oh; W. I. Milne; Min Koo Han; Jin Jang

doi:10.1116/1.589332

Field emission properties of ta-C films with nitrogen doping

Kyu Chang Park, Jong Hyun Moon, Suk Jae Chung, Jae Hoon Jung, Byeong Kwon Ju, Myung Hwan Oh, W. I. Milne, Min Koo Han, Jin Jang

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.

Original language	English
Pages (from-to)	431-433
Number of pages	3
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	15
Issue number	2
DOIs	https://doi.org/10.1116/1.589332
Publication status	Published - 1997
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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title = "Field emission properties of ta-C films with nitrogen doping",

abstract = "We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.",

author = "Park, {Kyu Chang} and Moon, {Jong Hyun} and Chung, {Suk Jae} and Jung, {Jae Hoon} and Ju, {Byeong Kwon} and Oh, {Myung Hwan} and Milne, {W. I.} and Han, {Min Koo} and Jin Jang",

year = "1997",

doi = "10.1116/1.589332",

language = "English",

volume = "15",

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T1 - Field emission properties of ta-C films with nitrogen doping

AU - Park, Kyu Chang

AU - Moon, Jong Hyun

AU - Chung, Suk Jae

AU - Jung, Jae Hoon

AU - Ju, Byeong Kwon

AU - Oh, Myung Hwan

AU - Milne, W. I.

AU - Han, Min Koo

AU - Jang, Jin

PY - 1997

Y1 - 1997

N2 - We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.

AB - We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.

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JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 2

ER -

Field emission properties of ta-C films with nitrogen doping

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