Field emission properties of ta-C films with nitrogen doping

Kyu Chang Park, Jong Hyun Moon, Suk Jae Chung, Jae Hoon Jung, Byeong Kwon Ju, Myung Hwan Oh, W. I. Milne, Min Koo Han, Jin Jang

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.

Original languageEnglish
Pages (from-to)431-433
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number2
Publication statusPublished - 1997 Mar 1
Externally publishedYes

Fingerprint

Carbon films
Amorphous carbon
Amorphous films
Field emission
field emission
Doping (additives)
Nitrogen
nitrogen
carbon
Electron emission
Fermi level
Conduction bands
electron emission
conduction bands
conductivity
shift
room temperature
Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Park, K. C., Moon, J. H., Chung, S. J., Jung, J. H., Ju, B. K., Oh, M. H., ... Jang, J. (1997). Field emission properties of ta-C films with nitrogen doping. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 15(2), 431-433.

Field emission properties of ta-C films with nitrogen doping. / Park, Kyu Chang; Moon, Jong Hyun; Chung, Suk Jae; Jung, Jae Hoon; Ju, Byeong Kwon; Oh, Myung Hwan; Milne, W. I.; Han, Min Koo; Jang, Jin.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 15, No. 2, 01.03.1997, p. 431-433.

Research output: Contribution to journalArticle

Park, KC, Moon, JH, Chung, SJ, Jung, JH, Ju, BK, Oh, MH, Milne, WI, Han, MK & Jang, J 1997, 'Field emission properties of ta-C films with nitrogen doping', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 15, no. 2, pp. 431-433.
Park, Kyu Chang ; Moon, Jong Hyun ; Chung, Suk Jae ; Jung, Jae Hoon ; Ju, Byeong Kwon ; Oh, Myung Hwan ; Milne, W. I. ; Han, Min Koo ; Jang, Jin. / Field emission properties of ta-C films with nitrogen doping. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 1997 ; Vol. 15, No. 2. pp. 431-433.
@article{774b4911dbc84c22b78b3bcb4d7a86f5,
title = "Field emission properties of ta-C films with nitrogen doping",
abstract = "We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.",
author = "Park, {Kyu Chang} and Moon, {Jong Hyun} and Chung, {Suk Jae} and Jung, {Jae Hoon} and Ju, {Byeong Kwon} and Oh, {Myung Hwan} and Milne, {W. I.} and Han, {Min Koo} and Jin Jang",
year = "1997",
month = "3",
day = "1",
language = "English",
volume = "15",
pages = "431--433",
journal = "Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "2",

}

TY - JOUR

T1 - Field emission properties of ta-C films with nitrogen doping

AU - Park, Kyu Chang

AU - Moon, Jong Hyun

AU - Chung, Suk Jae

AU - Jung, Jae Hoon

AU - Ju, Byeong Kwon

AU - Oh, Myung Hwan

AU - Milne, W. I.

AU - Han, Min Koo

AU - Jang, Jin

PY - 1997/3/1

Y1 - 1997/3/1

N2 - We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.

AB - We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.

UR - http://www.scopus.com/inward/record.url?scp=0001083256&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001083256&partnerID=8YFLogxK

M3 - Article

VL - 15

SP - 431

EP - 433

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

SN - 1071-1023

IS - 2

ER -