We have studied the electron emission characteristics of tetrahedral amorphous carbon (ta-C) films with different nitrogen content. With increasing N content in ta-C, the room-temperature conductivity as well as the emission current decreases and then increases, resulting in minima. The Fermi level shifts toward the conduction band and, thus, the work function decreases by N doping in ta-C, however, the emission currents of doped ta-C films are less than those of undoped ta-C.
|Number of pages||3|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 1997 Mar 1|
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Physics and Astronomy (miscellaneous)
- Surfaces and Interfaces