Field-induced manipulation of Ag clusters for tailoring of nanostructures on a silicon surface

Kang Ho Park, Jeong Sook Ha, Wan Soo Yun, El Hang Lee

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We devised new nanofabrication methods using a manipulation of self-organized Ag clusters on Sb-terminated Si(100) surfaces by a scanning tunneling microscope (STM) tip. Various kinds of nanostructures could be manufactured by dot-by-dot manipulation. We found that two methods could be used for those fabrications; (1) Ag clusters could be detached and redeposited by a field-induced manipulation using an STM tip and (2) Ag clusters could be also detached from the surface via the formation of mechanical point contact between the tip and clusters. These fabrication methods were systemaucally investigated with variation of manipulation conditions such as a bias voltage and a tip-sample distance.

Original languageEnglish
Pages (from-to)1441-1444
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume17
Issue number4
Publication statusPublished - 1999 Jul 1
Externally publishedYes

Fingerprint

Silicon
manipulators
Nanostructures
Microscopes
Scanning
Fabrication
Point contacts
silicon
Bias voltage
Nanotechnology
microscopes
fabrication
scanning
nanofabrication
electric potential

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Field-induced manipulation of Ag clusters for tailoring of nanostructures on a silicon surface. / Park, Kang Ho; Ha, Jeong Sook; Yun, Wan Soo; Lee, El Hang.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 17, No. 4, 01.07.1999, p. 1441-1444.

Research output: Contribution to journalArticle

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