Abstract
ZnO thin films and nanowires (NWs) were precisely treated by focused electron-beam (E-beam) irradiation with a line width between 200 nm and 3 μm. For both ZnO films and NWs, an increased green emission was clearly observed for the E-beam-treated parts. Using a high-resolution laser confocal microscope, the photoluminescence intensities for E-beam-treated ZnO structures increased with increasing dose 1.0 × 1017-1.0 × 1018 electrons/cm2. The resistivity of a single ZnO NW increased from 56 to 1800 Ω cm after the E-beam treatment. From the results for the annealed ZnO thin films, we analyzed that the variations in PL and resistivity were due to the formation of vacancies upon focused E-beam irradiation.
Original language | English |
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Pages (from-to) | 1228-1233 |
Number of pages | 6 |
Journal | Current Applied Physics |
Volume | 14 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2014 Sept |
Keywords
- Electron irradiation
- Focused electron beam
- Nanowire
- Photoluminescence
- ZnO
ASJC Scopus subject areas
- Materials Science(all)
- Physics and Astronomy(all)