Force based displacement measurement in micromechanical devices

S. J. O'Shea; C. K. Ng; Y. Y. Tan; Y. Xu; E. H. Tay; B. L. Chua; N. C. Tien; X. S. Tang; W. T. Chen

doi:10.1063/1.1380398

Force based displacement measurement in micromechanical devices

S. J. O'Shea, C. K. Ng, Y. Y. Tan, Y. Xu, E. H. Tay, B. L. Chua, N. C. Tien, X. S. Tang, W. T. Chen

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.

Original language	English
Pages (from-to)	4031-4033
Number of pages	3
Journal	Applied Physics Letters
Volume	78
Issue number	25
DOIs	https://doi.org/10.1063/1.1380398
Publication status	Published - 2001 Jun 18

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1380398

Cite this

@article{cb78c46445b746d3ba77fa73d6f921f3,

title = "Force based displacement measurement in micromechanical devices",

abstract = "We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.",

author = "O'Shea, {S. J.} and Ng, {C. K.} and Tan, {Y. Y.} and Y. Xu and Tay, {E. H.} and Chua, {B. L.} and Tien, {N. C.} and Tang, {X. S.} and Chen, {W. T.}",

year = "2001",

month = jun,

day = "18",

doi = "10.1063/1.1380398",

language = "English",

volume = "78",

pages = "4031--4033",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "25",

}

TY - JOUR

T1 - Force based displacement measurement in micromechanical devices

AU - O'Shea, S. J.

AU - Ng, C. K.

AU - Tan, Y. Y.

AU - Xu, Y.

AU - Tay, E. H.

AU - Chua, B. L.

AU - Tien, N. C.

AU - Tang, X. S.

AU - Chen, W. T.

PY - 2001/6/18

Y1 - 2001/6/18

N2 - We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.

AB - We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.

UR - http://www.scopus.com/inward/record.url?scp=17844395442&partnerID=8YFLogxK

U2 - 10.1063/1.1380398

DO - 10.1063/1.1380398

M3 - Article

AN - SCOPUS:17844395442

SN - 0003-6951

VL - 78

SP - 4031

EP - 4033

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 25

ER -

Force based displacement measurement in micromechanical devices

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this