Force based displacement measurement in micromechanical devices

S. J. O'Shea, C. K. Ng, Y. Y. Tan, Y. Xu, E. H. Tay, Beelee Chua, N. C. Tien, X. S. Tang, W. T. Chen

Research output: Contribution to journalArticle

1 Citation (Scopus)


We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.

Original languageEnglish
Pages (from-to)4031-4033
Number of pages3
JournalApplied Physics Letters
Issue number25
Publication statusPublished - 2001 Jun 18
Externally publishedYes


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

O'Shea, S. J., Ng, C. K., Tan, Y. Y., Xu, Y., Tay, E. H., Chua, B., ... Chen, W. T. (2001). Force based displacement measurement in micromechanical devices. Applied Physics Letters, 78(25), 4031-4033.