Force based displacement measurement in micromechanical devices

S. J. O'Shea, C. K. Ng, Y. Y. Tan, Y. Xu, E. H. Tay, B. L. Chua, N. C. Tien, X. S. Tang, W. T. Chen

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.

Original languageEnglish
Pages (from-to)4031-4033
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number25
DOIs
Publication statusPublished - 2001 Jun 18

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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  • Cite this

    O'Shea, S. J., Ng, C. K., Tan, Y. Y., Xu, Y., Tay, E. H., Chua, B. L., Tien, N. C., Tang, X. S., & Chen, W. T. (2001). Force based displacement measurement in micromechanical devices. Applied Physics Letters, 78(25), 4031-4033. https://doi.org/10.1063/1.1380398