Force based displacement measurement in micromechanical devices

S. J. O'Shea, C. K. Ng, Y. Y. Tan, Y. Xu, E. H. Tay, Beelee Chua, N. C. Tien, X. S. Tang, W. T. Chen

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.

Original languageEnglish
Pages (from-to)4031-4033
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number25
DOIs
Publication statusPublished - 2001 Jun 18
Externally publishedYes

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displacement measurement
accelerometers
atomic force microscopy
electrostatics
sensitivity

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

O'Shea, S. J., Ng, C. K., Tan, Y. Y., Xu, Y., Tay, E. H., Chua, B., ... Chen, W. T. (2001). Force based displacement measurement in micromechanical devices. Applied Physics Letters, 78(25), 4031-4033. https://doi.org/10.1063/1.1380398

Force based displacement measurement in micromechanical devices. / O'Shea, S. J.; Ng, C. K.; Tan, Y. Y.; Xu, Y.; Tay, E. H.; Chua, Beelee; Tien, N. C.; Tang, X. S.; Chen, W. T.

In: Applied Physics Letters, Vol. 78, No. 25, 18.06.2001, p. 4031-4033.

Research output: Contribution to journalArticle

O'Shea, SJ, Ng, CK, Tan, YY, Xu, Y, Tay, EH, Chua, B, Tien, NC, Tang, XS & Chen, WT 2001, 'Force based displacement measurement in micromechanical devices', Applied Physics Letters, vol. 78, no. 25, pp. 4031-4033. https://doi.org/10.1063/1.1380398
O'Shea SJ, Ng CK, Tan YY, Xu Y, Tay EH, Chua B et al. Force based displacement measurement in micromechanical devices. Applied Physics Letters. 2001 Jun 18;78(25):4031-4033. https://doi.org/10.1063/1.1380398
O'Shea, S. J. ; Ng, C. K. ; Tan, Y. Y. ; Xu, Y. ; Tay, E. H. ; Chua, Beelee ; Tien, N. C. ; Tang, X. S. ; Chen, W. T. / Force based displacement measurement in micromechanical devices. In: Applied Physics Letters. 2001 ; Vol. 78, No. 25. pp. 4031-4033.
@article{cb78c46445b746d3ba77fa73d6f921f3,
title = "Force based displacement measurement in micromechanical devices",
abstract = "We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.",
author = "O'Shea, {S. J.} and Ng, {C. K.} and Tan, {Y. Y.} and Y. Xu and Tay, {E. H.} and Beelee Chua and Tien, {N. C.} and Tang, {X. S.} and Chen, {W. T.}",
year = "2001",
month = "6",
day = "18",
doi = "10.1063/1.1380398",
language = "English",
volume = "78",
pages = "4031--4033",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "25",

}

TY - JOUR

T1 - Force based displacement measurement in micromechanical devices

AU - O'Shea, S. J.

AU - Ng, C. K.

AU - Tan, Y. Y.

AU - Xu, Y.

AU - Tay, E. H.

AU - Chua, Beelee

AU - Tien, N. C.

AU - Tang, X. S.

AU - Chen, W. T.

PY - 2001/6/18

Y1 - 2001/6/18

N2 - We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.

AB - We demonstrate how force detection methods based on atomic force microscopy can be used to measure displacement in micromechanical devices. We show the operation of a simple microfabricated accelerometer, the proof mass of which incorporates a tip which can be moved towards an opposing surface. Both noncontact operation using long range electrostatic forces and tapping mode operation are demonstrated. The displacement sensitivity of the present device using feedback to control the tip-surface separation is approximately 1 nm.

UR - http://www.scopus.com/inward/record.url?scp=17844395442&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=17844395442&partnerID=8YFLogxK

U2 - 10.1063/1.1380398

DO - 10.1063/1.1380398

M3 - Article

AN - SCOPUS:17844395442

VL - 78

SP - 4031

EP - 4033

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 25

ER -