Formation of Flexible and Transparent Indium Gallium Zinc Oxide/Ag/Indium Gallium Zinc Oxide Multilayer Film

Jun Ho Kim, Da Som Kim, Sun Kyung Kim, Young Zo Yoo, Jeong Hwan Lee, Sang Woo Kim, Tae Yeon Seong

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

In this study, the electrical, optical, and bending characteristics of amorphous indium gallium zinc oxide (IGZO)/Ag/IGZO (39 nm/19 nm/39 nm) multilayer films deposited on polyethylene terephthalate (PET) substrate at room temperature were investigated and compared with those of Sn-doped indium oxide (ITO) (100 nm thick) films. At 500 nm the ITO film transmitted 91.3% and the IGZO/Ag/IGZO multilayer film transmitted 88.8%. The calculated transmittance spectrum of the multilayer film was similar to the experimental result. The ITO film and IGZO/Ag/IGZO multilayer film, respectively, showed carrier concentrations of 1.79 × 1020 and 7.68 × 1021 cm−3 and mobilities of 27.18 cm2/V s and 18.17 cm2/V s. The ITO film had a sheet resistance of 134.9 Ω/sq and the IGZO/Ag/IGZO multilayer film one of 5.09 Ω/sq. Haacke’s figure of merit (FOM) was calculated to be 1.94 × 10−3 for the ITO film and 45.02 × 10−3 Ω−1 for the IGZO/Ag/IGZO multilayer film. The resistance change of 100 nm-thick ITO film was unstable even after five cycles, while that of the IGZO/Ag/IGZO film was constant up to 1000 cycles.

Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalJournal of Electronic Materials
DOIs
Publication statusAccepted/In press - 2016 May 11

Fingerprint

Zinc Oxide
gallium oxides
Gallium
Indium
Multilayer films
Zinc oxide
zinc oxides
Oxide films
indium
ITO (semiconductors)
cycles
Polyethylene Terephthalates
Sheet resistance
polyethylene terephthalate
Thick films
figure of merit
indium oxides
thick films
Carrier concentration
oxide films

Keywords

  • Ag
  • flexible
  • InGaZnO
  • multilayer
  • transparent conducting electrode

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

Formation of Flexible and Transparent Indium Gallium Zinc Oxide/Ag/Indium Gallium Zinc Oxide Multilayer Film. / Kim, Jun Ho; Kim, Da Som; Kim, Sun Kyung; Yoo, Young Zo; Lee, Jeong Hwan; Kim, Sang Woo; Seong, Tae Yeon.

In: Journal of Electronic Materials, 11.05.2016, p. 1-5.

Research output: Contribution to journalArticle

Kim, Jun Ho ; Kim, Da Som ; Kim, Sun Kyung ; Yoo, Young Zo ; Lee, Jeong Hwan ; Kim, Sang Woo ; Seong, Tae Yeon. / Formation of Flexible and Transparent Indium Gallium Zinc Oxide/Ag/Indium Gallium Zinc Oxide Multilayer Film. In: Journal of Electronic Materials. 2016 ; pp. 1-5.
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