Formation of high ultraviolet transparent SrVOx/Ag-based conducting electrode

Su Kyung Kim, Jin Woo Cho, Hyeong Seop Im, Weon Cheol Lim, Sun Kyung Kim, Tae Yeon Seong

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Sputter-deposited SrVOx was employed to create transparent conducting SrVOx/Ag/SrVOx films and their optical-electrical properties were examined as functions of SrVOx and Ag thicknesses. With the increase in the thickness of SrVOx films from 15 to 45 nm in the SrVOx/Ag/SrVOx films, the carrier concentration, sheet resistance, and electron mobility were in the range of 2.0 × 1022 − 1.03 × 1022 cm−3, 3.15−2.76 Ω/sq., and 21.99−19.76 cm2/Vs, respectively. The 25 nm-thick SrVOx-based multilayer gave the highest average transmittance (Tav) of 91.5%. The 25 nm-thick SrVOx-based multilayer gave the largest Haacke's figure of merit (FOM) of 144.5 × 10−3 Ω−1. With increasing Ag layer thickness from 9 to 21 nm, the carrier concentration, mobility and sheet resistance of the multilayers were in the range of 1.05 × 1022 − 1.99 × 1022 cm−3, 15.56−22.46 cm2/Vs, and 1.97−6.48 Ω/sq., respectively. The Tav of the SrVOx (25 nm)/Ag/SrVOx (25 nm) multilayer gradually decreased from 95.5 to 82.6% with the Ag layer thickness. The rigorous coupled-wave (RCW) simulations were performed to describe the wavelength-dependent transmittance characteristics of the SrVOx (25 nm)/Ag (15 nm)/SrVOx (25 nm) samples. Based on the phasor examination, the effect of the SrVOx film thickness on the transmittance characteristics of the multilayers is described and discussed.

Original languageEnglish
Pages (from-to)19484-19490
Number of pages7
JournalCeramics International
Volume46
Issue number11
DOIs
Publication statusPublished - 2020 Aug 1

Keywords

  • Ag layer
  • Oxide/metal/oxide multilayer
  • Phasor analysis
  • SrVO
  • Transparent conducting electrode
  • Ultraviolet transparency

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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