The formation of Ni-Mg solid solution/Au schemes for the formation of low resistance and transparent ohmic contacts to p-GaN was investigated. The light transmittance of the 550°C contacts was measured to be 79% and 95.6% at 460 nm for the contacts with the individual layer thickness of 8 and 5 nm. The results indicated that the solid solution is a promising metallization scheme for the fabrication of high performance optical devices.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)