We report on the formation of high-quality nonalloyed Ti (30 nm)/Au (50 nm) ohmic contacts to n-type ZnO:Al using laser irradiation treatment. The electrical characteristics of the Ti/Au contacts are considerably improved when laser-irradiated. The specific contact resistances are measured to be ∼ 10-4 Ω cm2 when the ZnO layers were laser irradiated, which is about two orders of magnitude lower than that of the as-grown sample. Based on electrical and X-ray photoelectron spectroscopy results, a possible mechanism for the laser-irradiation-induced improvement is described.
ASJC Scopus subject areas
- Materials Science(all)