Formation of low resistance nonalloyed Ti/Au ohmic contacts to n-type ZnO by KrF excimer laser irradiation

Min Suk Oh, Sang Ho Kim, Dae Kue Hwang, Seong Ju Park, Tae Yeon Seong

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We report on the formation of high-quality nonalloyed Ti (30 nm)/Au (50 nm) ohmic contacts to n-type ZnO:Al using laser irradiation treatment. The electrical characteristics of the Ti/Au contacts are considerably improved when laser-irradiated. The specific contact resistances are measured to be ∼ 10-4 Ω cm2 when the ZnO layers were laser irradiated, which is about two orders of magnitude lower than that of the as-grown sample. Based on electrical and X-ray photoelectron spectroscopy results, a possible mechanism for the laser-irradiation-induced improvement is described.

Original languageEnglish
JournalElectrochemical and Solid-State Letters
Issue number11
Publication statusPublished - 2005 Nov 21


ASJC Scopus subject areas

  • Electrochemistry
  • Materials Science(all)

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