Formation of Low-Resistivity Nickel Germanide Using Atomic Layer Deposited Nickel Thin Film

Hyun Jun Ahn, Jungmin Moon, Yujin Seo, Tae In Lee, Choong Ki Kim, Wan Sik Hwang, Hyun-Yong Yu, Byung Jin Cho

Research output: Contribution to journalArticle

10 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science