Abstract
We have integrated a 64Mb nonvolatile random access memory using phase transition phenomena. Based on 0.18um-CMOS technologies, the vertical contact typed memory cell is fabricated. The device density can be sharply increased with decreasing the writing current and the GST size. But, for reduction of writing current, issues including set and interface resistances should be stabilized. Additionally, our results also show the feasibility of 256Mb nonvolatile PRAM with writing time below 100ns.
Original language | English |
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Pages (from-to) | 20-21 |
Number of pages | 2 |
Journal | Digest of Technical Papers - Symposium on VLSI Technology |
DOIs | |
Publication status | Published - 2004 |
Event | 2004 Symposium on VLSI Technology - Digest of Technical Papers - Honolulu, HI, United States Duration: 2004 Jun 15 → 2004 Jun 17 |
Keywords
- Cell characteristics
- High density
- PRAM
ASJC Scopus subject areas
- Electrical and Electronic Engineering