Full range optical and electrical properties of Zn-doped SnO2 and oxide/metal/oxide multilayer thin films deposited on flexible PET substrate

Yoonho Cho, Narendra S. Parmar, Sahn Nahm, Ji Won Choi

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

As a potential replacement of indium-tin oxide (ITO), Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer transparent conducting electrodes were prepared on the flexible poly ethylene terephthalate (PET) substrates by RF sputtering at room temperature. To find the optimized composition of Zn-doped SnO2 thin film, which will have higher conductivity and transmittance as compared to the undoped SnO2 thin film, an off-axis Continuous Composition Spread (CCS) sputtering method was used. Zn-doped SnO2 thin films have lower resistivity than undoped SnO2 thin films due to excess oxygen vacancies (Vo) and/or zin interstitials (Zni) in thin films. The minimum resistivity of thin film was 0.13 Ω cm at optimized 2.43 wt% Zn-doping. Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer thin films were prepared using the optimized composition deposited by an on-axis RF sputter. The multilayer TCO film has the resistivity ∼5.33 × 10−5 Ω cm and the average transmittance >85% in the 550 nm wavelength region.

Original languageEnglish
Pages (from-to)217-222
Number of pages6
JournalJournal of Alloys and Compounds
Volume694
DOIs
Publication statusPublished - 2017 Feb 15

Keywords

  • CCS
  • Doping
  • OMO multilayer
  • Optical and electrical properties
  • SnO
  • TCO

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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