Gated field emitter using carbon nanotubes for vacuum microelectronic devices

Yoon Taek Jang; Chang Hoon Choi; Byeong Kwon Ju; Jin Ho Ahn; Yun Hi Lee

Gated field emitter using carbon nanotubes for vacuum microelectronic devices

Yoon Taek Jang, Chang Hoon Choi, Byeong Kwon Ju, Jin Ho Ahn, Yun Hi Lee

Department of Physics

Research output: Contribution to conference › Paper › peer-review

4 Citations (Scopus)

Abstract

We have fabricated the gated field emitter using directly grown carbon nanotubes (CNTs) as an electron emission source. Vertically aligned CNTs were grown at the center of the gate hole using thermal chemical vapor deposition. In order to reduce the leakage current due to flowing current along CNTs grown on the sidewalls of the gate hole, we adopted new process scheme such as sidewall protector. The leakage current of gated CNTs emitter with sidewall protector shows a decrease of 85.8% compared to that of conventional structure.

Original language	English
Pages	37-40
Number of pages	4
Publication status	Published - 2003
Event	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: 2003 Jan 19 → 2003 Jan 23

Other

Other	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
Country/Territory	Japan
City	Kyoto
Period	03/1/19 → 03/1/23

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

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title = "Gated field emitter using carbon nanotubes for vacuum microelectronic devices",

abstract = "We have fabricated the gated field emitter using directly grown carbon nanotubes (CNTs) as an electron emission source. Vertically aligned CNTs were grown at the center of the gate hole using thermal chemical vapor deposition. In order to reduce the leakage current due to flowing current along CNTs grown on the sidewalls of the gate hole, we adopted new process scheme such as sidewall protector. The leakage current of gated CNTs emitter with sidewall protector shows a decrease of 85.8% compared to that of conventional structure.",

author = "Jang, {Yoon Taek} and Choi, {Chang Hoon} and Ju, {Byeong Kwon} and Ahn, {Jin Ho} and Lee, {Yun Hi}",

year = "2003",

language = "English",

pages = "37--40",

note = "IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems ; Conference date: 19-01-2003 Through 23-01-2003",

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TY - CONF

T1 - Gated field emitter using carbon nanotubes for vacuum microelectronic devices

AU - Jang, Yoon Taek

AU - Choi, Chang Hoon

AU - Ju, Byeong Kwon

AU - Ahn, Jin Ho

AU - Lee, Yun Hi

PY - 2003

Y1 - 2003

N2 - We have fabricated the gated field emitter using directly grown carbon nanotubes (CNTs) as an electron emission source. Vertically aligned CNTs were grown at the center of the gate hole using thermal chemical vapor deposition. In order to reduce the leakage current due to flowing current along CNTs grown on the sidewalls of the gate hole, we adopted new process scheme such as sidewall protector. The leakage current of gated CNTs emitter with sidewall protector shows a decrease of 85.8% compared to that of conventional structure.

AB - We have fabricated the gated field emitter using directly grown carbon nanotubes (CNTs) as an electron emission source. Vertically aligned CNTs were grown at the center of the gate hole using thermal chemical vapor deposition. In order to reduce the leakage current due to flowing current along CNTs grown on the sidewalls of the gate hole, we adopted new process scheme such as sidewall protector. The leakage current of gated CNTs emitter with sidewall protector shows a decrease of 85.8% compared to that of conventional structure.

UR - http://www.scopus.com/inward/record.url?scp=0037818346&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0037818346

SP - 37

EP - 40

T2 - IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Y2 - 19 January 2003 through 23 January 2003

ER -

Gated field emitter using carbon nanotubes for vacuum microelectronic devices

Abstract

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ASJC Scopus subject areas

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