Graphoepitaxial Assembly of Block Copolymer for Bending Stripe Patterns

June Huh; Mi Jeong Kim; Jong Wan Park

doi:10.1002/mats.201900009

Graphoepitaxial Assembly of Block Copolymer for Bending Stripe Patterns

June Huh, Mi Jeong Kim, Jong Wan Park

Research output: Contribution to journal › Article

Abstract

The formation of bend patterns using block copolymer (BCP) lamellae within trench-type groove patterned with bend geometry is simulated by using a Monte Carlo simulation and a strong segregation theory. A tolerance of curvatures at the bend corners of the guide pattern for the formation of bent lamellae is proposed. It is found from the simulation and the strong segregation theory that the tolerance for the difference in curvature radii of two bend corners for the well-patterned lamellar bends is proportional to the inverse of the trench width in the straight region.

Original language	English
Article number	1900009
Journal	Macromolecular Theory and Simulations
DOIs	https://doi.org/10.1002/mats.201900009
Publication status	Published - 2019 Jan 1

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Keywords

block copolymer
directed self-assembly
monte carlo simulation
nanopatterning

ASJC Scopus subject areas

Condensed Matter Physics
Organic Chemistry
Polymers and Plastics
Inorganic Chemistry
Materials Chemistry

Cite this

Huh, J., Kim, M. J., & Park, J. W. (2019). Graphoepitaxial Assembly of Block Copolymer for Bending Stripe Patterns. Macromolecular Theory and Simulations, [1900009]. https://doi.org/10.1002/mats.201900009

@article{a2b5c21fc44e4eb38407dde7a0d98a11,

title = "Graphoepitaxial Assembly of Block Copolymer for Bending Stripe Patterns",

abstract = "The formation of bend patterns using block copolymer (BCP) lamellae within trench-type groove patterned with bend geometry is simulated by using a Monte Carlo simulation and a strong segregation theory. A tolerance of curvatures at the bend corners of the guide pattern for the formation of bent lamellae is proposed. It is found from the simulation and the strong segregation theory that the tolerance for the difference in curvature radii of two bend corners for the well-patterned lamellar bends is proportional to the inverse of the trench width in the straight region.",

keywords = "block copolymer, directed self-assembly, monte carlo simulation, nanopatterning",

author = "June Huh and Kim, {Mi Jeong} and Park, {Jong Wan}",

year = "2019",

month = jan

day = "1",

doi = "10.1002/mats.201900009",

language = "English",

journal = "Macromolecular Theory and Simulations",

issn = "1022-1344",

publisher = "Wiley-VCH Verlag",

}

TY - JOUR

T1 - Graphoepitaxial Assembly of Block Copolymer for Bending Stripe Patterns

AU - Huh, June

AU - Kim, Mi Jeong

AU - Park, Jong Wan

PY - 2019/1/1

Y1 - 2019/1/1

N2 - The formation of bend patterns using block copolymer (BCP) lamellae within trench-type groove patterned with bend geometry is simulated by using a Monte Carlo simulation and a strong segregation theory. A tolerance of curvatures at the bend corners of the guide pattern for the formation of bent lamellae is proposed. It is found from the simulation and the strong segregation theory that the tolerance for the difference in curvature radii of two bend corners for the well-patterned lamellar bends is proportional to the inverse of the trench width in the straight region.

AB - The formation of bend patterns using block copolymer (BCP) lamellae within trench-type groove patterned with bend geometry is simulated by using a Monte Carlo simulation and a strong segregation theory. A tolerance of curvatures at the bend corners of the guide pattern for the formation of bent lamellae is proposed. It is found from the simulation and the strong segregation theory that the tolerance for the difference in curvature radii of two bend corners for the well-patterned lamellar bends is proportional to the inverse of the trench width in the straight region.

KW - block copolymer

KW - directed self-assembly

KW - monte carlo simulation

KW - nanopatterning

UR - http://www.scopus.com/inward/record.url?scp=85064687009&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85064687009&partnerID=8YFLogxK

U2 - 10.1002/mats.201900009

DO - 10.1002/mats.201900009

M3 - Article

AN - SCOPUS:85064687009

JO - Macromolecular Theory and Simulations

JF - Macromolecular Theory and Simulations

SN - 1022-1344

M1 - 1900009

ER -

Access to Document

10.1002/mats.201900009