Abstract
The formation of bend patterns using block copolymer (BCP) lamellae within trench-type groove patterned with bend geometry is simulated by using a Monte Carlo simulation and a strong segregation theory. A tolerance of curvatures at the bend corners of the guide pattern for the formation of bent lamellae is proposed. It is found from the simulation and the strong segregation theory that the tolerance for the difference in curvature radii of two bend corners for the well-patterned lamellar bends is proportional to the inverse of the trench width in the straight region.
| Original language | English |
|---|---|
| Article number | 1900009 |
| Journal | Macromolecular Theory and Simulations |
| DOIs | |
| Publication status | Published - 2019 Jan 1 |
Keywords
- block copolymer
- directed self-assembly
- monte carlo simulation
- nanopatterning
ASJC Scopus subject areas
- Condensed Matter Physics
- Organic Chemistry
- Polymers and Plastics
- Inorganic Chemistry
- Materials Chemistry
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Huh, J., Kim, M. J., & Park, J. W. (2019). Graphoepitaxial Assembly of Block Copolymer for Bending Stripe Patterns. Macromolecular Theory and Simulations, [1900009]. https://doi.org/10.1002/mats.201900009