A low-temperature growth of carbon nanotubes (CNTs) on a sodalime glass substrate at 550°C was achieved by a thermal chemical vapor deposition (CVD) of acetylene gas. Acetylene gas was heated in the first zone of the reactor at 850°C and then brought into the second zone maintained at 550°C for the nanotube growth on the glass substrate. The sodalime glass did not exhibit thermal deformation or material degradation throughout the process. Electron emission sufficient for flat panel displays was observed with the practical range of the applied field, i.e., 1 mA/cm 2 at 5 V/μm. This development is an important progress in the integrated process for the mass production of glass-sealed CNT-based field emission displays (FEDs).
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Atomic and Molecular Physics, and Optics