Growth and optical properties of GaN on Si(1 1 1) substrates

In-Hwan Lee, S. J. Lim, Yongjo Park

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

We report on the growth of high-quality GaN epitaxial layers on Si(1 1 1) substrates using high-temperature-grown AlN as buffer layer by metalorganic chemical vapor deposition. It is found that the nitride compounds on the reactor wall have great influence on the initial surface condition of the Si substrates because they are dissociated from the wall and modifies the Si surface during the initial heat-up procedure. When the reactor wall is coated with the GaN after the growth of GaN/AlN/Si, the harmful Ga-containing droplets are formed on the AlN buffer layer, leading to deteriorated films. To prevent the droplets, coating AlN on the reactor wall (pre-treatment) is followed by the growth GaN/ALN/Si. This pre-treatment insures AlN environment and suppresses the formation of the droplets during initial heat-up, leading to reproducible and favorable surface condition for the growth of AlN buffer layer and subsequent GaN epitaxial films. In order to illustrate the optical properties of the GaN layer, photoluminescence is measured between 14 K and room temperature. Intense band edge emission and well-resolved excitonic transitions indicate an excellent optical quality of the epitaxial GaN films.

Original languageEnglish
Pages (from-to)73-78
Number of pages6
JournalJournal of Crystal Growth
Volume235
Issue number1-4
DOIs
Publication statusPublished - 2002 Feb 1
Externally publishedYes

Keywords

  • A3. Metalorganic chemical vapor deposition
  • Al. Photoluminescence
  • Al. Stresses
  • Bl. Nitrides

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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