TY - GEN
T1 - Growth behavior of carbon tips grown by electron beam induced deposition method
AU - Park, Sung Hwak
AU - Kim, S. H.
AU - Shin, J. K.
AU - Kim, Jaewan
AU - Kang, C. J.
AU - Kim, Yong Sang
AU - Choi, Y. J.
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2007
Y1 - 2007
N2 - For the investigation of high aspect ratio structures with Atomic Force Microscope (AFM), the cantilevers with very sharp and long tips are useful. Electron beam induced deposited(EBID) tips can be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope (SEM). However, the EBID tips cannot grow over 1 μm in the residual gas atmosphere since there is a little carbon source. We could enhance the height of tips by dipping the cantilever into the organic solvents, drying it in the vacuum chamber and irradiating electron beam on it. With this process, we could acquire the tip whose base diameter is 180nm and effective length is 3.18μm. In addition, we observed that the growth behaviors of the tips are different in accordance with the species of the solvents and we will discuss the effects of the organic solvents on the growth of the tips.
AB - For the investigation of high aspect ratio structures with Atomic Force Microscope (AFM), the cantilevers with very sharp and long tips are useful. Electron beam induced deposited(EBID) tips can be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope (SEM). However, the EBID tips cannot grow over 1 μm in the residual gas atmosphere since there is a little carbon source. We could enhance the height of tips by dipping the cantilever into the organic solvents, drying it in the vacuum chamber and irradiating electron beam on it. With this process, we could acquire the tip whose base diameter is 180nm and effective length is 3.18μm. In addition, we observed that the growth behaviors of the tips are different in accordance with the species of the solvents and we will discuss the effects of the organic solvents on the growth of the tips.
KW - Atomic force microscope
KW - Dipping method
KW - Electron beam induced deposition
KW - High aspect ratio carbon tip
KW - Organic solvent
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U2 - 10.4028/0-87849-431-6.757
DO - 10.4028/0-87849-431-6.757
M3 - Conference contribution
AN - SCOPUS:38349091167
SN - 0878494316
SN - 9780878494316
T3 - Materials Science Forum
SP - 757
EP - 760
BT - Eco-Materials Processing and Design VIII - ISEPD-8, Proceedings of the 8th International Symposium on Eco-Materials Processing and Design
PB - Trans Tech Publications Ltd
T2 - 8th International Symposium on Eco-Materials Processing and Design, ISEPD-8
Y2 - 11 January 2007 through 13 January 2007
ER -