Growth behavior of carbon tips grown by electron beam induced deposition method

Sung Hwak Park, Sung Hyun Kim, J. K. Shin, Jaewan Kim, C. J. Kang, Yong Sang Kim, Y. J. Choi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

For the investigation of high aspect ratio structures with Atomic Force Microscope (AFM), the cantilevers with very sharp and long tips are useful. Electron beam induced deposited(EBID) tips can be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope (SEM). However, the EBID tips cannot grow over 1 μm in the residual gas atmosphere since there is a little carbon source. We could enhance the height of tips by dipping the cantilever into the organic solvents, drying it in the vacuum chamber and irradiating electron beam on it. With this process, we could acquire the tip whose base diameter is 180nm and effective length is 3.18μm. In addition, we observed that the growth behaviors of the tips are different in accordance with the species of the solvents and we will discuss the effects of the organic solvents on the growth of the tips.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages757-760
Number of pages4
Volume544-545
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event8th International Symposium on Eco-Materials Processing and Design, ISEPD-8 - Kitakyushu, Japan
Duration: 2007 Jan 112007 Jan 13

Publication series

NameMaterials Science Forum
Volume544-545
ISSN (Print)02555476

Other

Other8th International Symposium on Eco-Materials Processing and Design, ISEPD-8
CountryJapan
CityKitakyushu
Period07/1/1107/1/13

Keywords

  • Atomic force microscope
  • Dipping method
  • Electron beam induced deposition
  • High aspect ratio carbon tip
  • Organic solvent

ASJC Scopus subject areas

  • Materials Science(all)

Fingerprint Dive into the research topics of 'Growth behavior of carbon tips grown by electron beam induced deposition method'. Together they form a unique fingerprint.

  • Cite this

    Park, S. H., Kim, S. H., Shin, J. K., Kim, J., Kang, C. J., Kim, Y. S., & Choi, Y. J. (2007). Growth behavior of carbon tips grown by electron beam induced deposition method. In Materials Science Forum (Vol. 544-545, pp. 757-760). (Materials Science Forum; Vol. 544-545).