Abstract
For the investigation of high aspect ratio structures with Atomic Force Microscope (AFM), the cantilevers with very sharp and long tips are useful. Electron beam induced deposited(EBID) tips can be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope (SEM). However, the EBID tips cannot grow over 1 μm in the residual gas atmosphere since there is a little carbon source. We could enhance the height of tips by dipping the cantilever into the organic solvents, drying it in the vacuum chamber and irradiating electron beam on it. With this process, we could acquire the tip whose base diameter is 180nm and effective length is 3.18μm. In addition, we observed that the growth behaviors of the tips are different in accordance with the species of the solvents and we will discuss the effects of the organic solvents on the growth of the tips.
| Original language | English |
|---|---|
| Title of host publication | Materials Science Forum |
| Pages | 757-760 |
| Number of pages | 4 |
| Volume | 544-545 |
| Publication status | Published - 2007 Dec 1 |
| Externally published | Yes |
| Event | 8th International Symposium on Eco-Materials Processing and Design, ISEPD-8 - Kitakyushu, Japan Duration: 2007 Jan 11 → 2007 Jan 13 |
Publication series
| Name | Materials Science Forum |
|---|---|
| Volume | 544-545 |
| ISSN (Print) | 02555476 |
Other
| Other | 8th International Symposium on Eco-Materials Processing and Design, ISEPD-8 |
|---|---|
| Country | Japan |
| City | Kitakyushu |
| Period | 07/1/11 → 07/1/13 |
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Keywords
- Atomic force microscope
- Dipping method
- Electron beam induced deposition
- High aspect ratio carbon tip
- Organic solvent
ASJC Scopus subject areas
- Materials Science(all)
Cite this
Growth behavior of carbon tips grown by electron beam induced deposition method. / Park, Sung Hwak; Kim, Sung Hyun; Shin, J. K.; Kim, Jaewan; Kang, C. J.; Kim, Yong Sang; Choi, Y. J.
Materials Science Forum. Vol. 544-545 2007. p. 757-760 (Materials Science Forum; Vol. 544-545).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Growth behavior of carbon tips grown by electron beam induced deposition method
AU - Park, Sung Hwak
AU - Kim, Sung Hyun
AU - Shin, J. K.
AU - Kim, Jaewan
AU - Kang, C. J.
AU - Kim, Yong Sang
AU - Choi, Y. J.
PY - 2007/12/1
Y1 - 2007/12/1
N2 - For the investigation of high aspect ratio structures with Atomic Force Microscope (AFM), the cantilevers with very sharp and long tips are useful. Electron beam induced deposited(EBID) tips can be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope (SEM). However, the EBID tips cannot grow over 1 μm in the residual gas atmosphere since there is a little carbon source. We could enhance the height of tips by dipping the cantilever into the organic solvents, drying it in the vacuum chamber and irradiating electron beam on it. With this process, we could acquire the tip whose base diameter is 180nm and effective length is 3.18μm. In addition, we observed that the growth behaviors of the tips are different in accordance with the species of the solvents and we will discuss the effects of the organic solvents on the growth of the tips.
AB - For the investigation of high aspect ratio structures with Atomic Force Microscope (AFM), the cantilevers with very sharp and long tips are useful. Electron beam induced deposited(EBID) tips can be simply fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump of the Scanning Electron Microscope (SEM). However, the EBID tips cannot grow over 1 μm in the residual gas atmosphere since there is a little carbon source. We could enhance the height of tips by dipping the cantilever into the organic solvents, drying it in the vacuum chamber and irradiating electron beam on it. With this process, we could acquire the tip whose base diameter is 180nm and effective length is 3.18μm. In addition, we observed that the growth behaviors of the tips are different in accordance with the species of the solvents and we will discuss the effects of the organic solvents on the growth of the tips.
KW - Atomic force microscope
KW - Dipping method
KW - Electron beam induced deposition
KW - High aspect ratio carbon tip
KW - Organic solvent
UR - http://www.scopus.com/inward/record.url?scp=38349091167&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38349091167&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:38349091167
SN - 0878494316
SN - 9780878494316
VL - 544-545
T3 - Materials Science Forum
SP - 757
EP - 760
BT - Materials Science Forum
ER -