Heat treatment effects on mechanical properties of Ni–Co alloy thin films

S. J. Kim, H. W. Jung, M. W. Lee, Yun-Jae Kim, Y. H. Huh, J. H. Park

Research output: Contribution to journalArticle

Abstract

Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale is needed. Also, manufactured probe is heat-treated to release residual stress. In this paper, to understand mechanical properties and heat treatment effect in microscale, tensile tests for Ni–Co alloy thin film is performed using specimen with heat-treated under air. The Ni–Co thin film has some enhanced mechanical properties by heat effect and becomes brittle. The changes of grain size distribution and grain direction are observed through electron back-scattered diffraction (EBSD).

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalMechanics of Advanced Materials and Structures
DOIs
Publication statusAccepted/In press - 2018 Feb 22

Fingerprint

Heat Treatment
Treatment Effects
Mechanical Properties
Thin Films
Probe
Heat
Heat treatment
Thin films
Mechanical properties
Tensile Test
Grain Size
Residual Stress
Micro-electro-mechanical Systems
Thermal effects
MEMS
Diffraction
Residual stresses
Manufacturing
Vertical
Electron

Keywords

  • heat treatment effect
  • mechanical property
  • microscale tensile test
  • Ni–Co thin film
  • probe

ASJC Scopus subject areas

  • Civil and Structural Engineering
  • Mathematics(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Heat treatment effects on mechanical properties of Ni–Co alloy thin films. / Kim, S. J.; Jung, H. W.; Lee, M. W.; Kim, Yun-Jae; Huh, Y. H.; Park, J. H.

In: Mechanics of Advanced Materials and Structures, 22.02.2018, p. 1-7.

Research output: Contribution to journalArticle

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