High aspect ratio microreactor for MEMS fuel cells

Kyoung Won Na, Young Gyo Seo, Jae Wook Kim, Man Young Sung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, we investigated the fabrication of high aspect ratio micro molds using a commercially available AZ9260 positive photoresist® and a reactor for a miniature fuel cell having high aspect ratio structures with large surface area by metal plating in conjunction with the micromolds. A conventional contact mask aligner with standard UV light soures was used for creating micromolds. A photoresist thickness up to 24μm on a silicon substrate was accomplished by employing a multiple coating process. The line pitch of the electroplated metal line is 9μm (7.5μm reactor line width and 1.6μm space). The aspect ratio of about 15 was achieved in the structure of the microfabricated reactor with a 24μm thickness.

Original languageEnglish
Title of host publication2003 IEEE Conference on Electron Devices and Solid-State Circuits, EDSSC 2003
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages487-490
Number of pages4
ISBN (Print)0780377494, 9780780377493
DOIs
Publication statusPublished - 2003
Externally publishedYes
EventIEEE Conference on Electron Devices and Solid-State Circuits, EDSSC 2003 - Tsimshatsui, Kowloon, Hong Kong
Duration: 2003 Dec 162003 Dec 18

Other

OtherIEEE Conference on Electron Devices and Solid-State Circuits, EDSSC 2003
CountryHong Kong
CityTsimshatsui, Kowloon
Period03/12/1603/12/18

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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