High mobility organic transistor patterned by the shadow-mask with all structure on a plastic substrate

Joo Won Lee, Byeong Kwon Ju, Jin Jang, Young Soo Yoon, Jai Kyeong Kim

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Pentacene thin film transistors fabricated without photolithographic patterning were fabricated on the plastic substrates. Both the organic/inorganic thin films and metallic electrode were patterned by shifting the position of the shadow-mask which accompanies the substrate throughout the deposition process. By using an optically transparent zirconium oxide (ZrO2) as a gate insulator and octadecyltrimethoxysilane (OTMS) as an organic molecule for self-assembled monolayer (SAM) to increase the adhesion between the plastic substrate and gate insulator and the mobility with surface treatment, high-performance transistor with field effect mobility 0.66cm2/Vs and I on/I off > 105 was formed on the plastic substrate. This technique will be applicable to all structure deposited at low temperature and suitable for an easy process for flexible display.

Original languageEnglish
Pages (from-to)1026-1030
Number of pages5
JournalJournal of Materials Science
Volume42
Issue number3
DOIs
Publication statusPublished - 2007 Feb

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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